Comment epi2 SNF 2012-10-02 07:57:57: scrubber fault reset.
seymour at snf.stanford.edu
seymour at snf.stanford.edu
Sun Dec 23 08:52:21 PST 2012
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Problem epi2 SNF 2012-10-01 19:33:40: scrubber fault - wafers stuck
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Comment epi2 SNF 2012-10-02 07:57:57: scrubber fault reset.
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I did not remove wafer left in the tool.
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Problem epi2 SNF 2012-10-01 19:33:40: scrubber fault - wafers stuck
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Comment epi2 SNF 2012-10-02 07:57:57: scrubber fault reset.
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