Problem epi2 SNF 2012-10-03 16:07:18: Disruption in DCS

jasonlin at snf.stanford.edu jasonlin at snf.stanford.edu
Sun Dec 23 08:52:21 PST 2012


DCS deviation by 100% during 2nd Ge Etch Coat.
Resetted chamber, looks okay again, DCS flowing okay for now.



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