Problem epi2 SNF 2012-10-03 16:07:18: Disruption in DCS
tberg at snf.stanford.edu
tberg at snf.stanford.edu
Sun Dec 23 08:52:21 PST 2012
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Problem epi2 SNF 2012-10-03 16:07:18: Disruption in DCS
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Problem epi2 SNF 2012-10-08 12:23:50: wafer stuck in Ca A, LLA door cannot be closed
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temp has stabilized and so has flow
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Problem epi2 SNF 2012-10-03 16:07:18: Disruption in DCS
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Problem epi2 SNF 2012-10-08 12:23:50: wafer stuck in Ca A, LLA door cannot be closed
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