Problem epi2 SNF 2012-10-08 12:23:50: wafer stuck in Ca A, LLA door cannot be closed

junam at snf.stanford.edu junam at snf.stanford.edu
Sun Dec 23 08:52:21 PST 2012


"Ch A pressure deviation error" occurred during my run, and wafer stuck in Ch A.
Aborted the sequencer and claimed the wafers in LLA, but cannot close LLA, "LLA busy or not ready."



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