Problem epi2 SNF 2012-10-09 14:49:57: chA "isolated"

maurice at snf.stanford.edu maurice at snf.stanford.edu
Sun Dec 23 08:52:21 PST 2012


Found H2 pressure too high.  System would not go online with H2 high.  (What did AMAT do?)
Put system in a cycle purge mode and bled H2 down.
Once H2 was in range we were able to bring tool online normally



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