Problem epi2 SNF 2012-10-23 06:34:51: Ch A lower setpoint deviation fault

kcbalram at snf.stanford.edu kcbalram at snf.stanford.edu
Sun Dec 23 08:52:21 PST 2012


Additional errors on the fault screen:
Fatal fault of wafer from load lock A slot 8-258
Chamber A is not ready to send wafer
Krishna



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