Problem epi2 SNF 2012-10-30 12:55:21: Large particles on wafer surface

sclaussen at snf.stanford.edu sclaussen at snf.stanford.edu
Sun Dec 23 08:52:21 PST 2012


Large, sparse particles (visible by eye) on the top of 4/5 of our wafers from this morning. They do not seem to originate in the epitaxy (though of course it's difficult to say). I have the wafers, if the staff wants to inspect them.



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