Problem epi2 SNF 2012-11-08 03:11:44: Epi chamber error

tberg at snf.stanford.edu tberg at snf.stanford.edu
Sun Dec 23 08:52:21 PST 2012

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Replaced 4 bad lamps and ran GEetch coat no problems. Chamber 
leak rate test -leak rate was 10.6mT per minute

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