Problem epi2 SNF 2012-11-11 22:07:36: Cannot bring up the chamber temperature

junam at snf.stanford.edu junam at snf.stanford.edu
Sun Dec 23 08:52:21 PST 2012


After putting the chamber in "hot idle" mode, I cannot hear the usual powering-up sound. After waiting for 20~30 mins, I still cannot raise the chamber temperature higher than 300 oC.



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