Problem epi2 SNF 2012-11-11 22:07:36: Cannot bring up the chamber temperature

tberg at snf.stanford.edu tberg at snf.stanford.edu
Sun Dec 23 08:52:21 PST 2012


Adjusted active idle power to 6kw from 5kw . It heated up fine. Ran 2
 Geetchcoats no problem.



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