Problem epi2 SNF 2012-11-20 13:01:33: EtchCoat Ch.A fault

eldwin at snf.stanford.edu eldwin at snf.stanford.edu
Sun Dec 23 08:52:21 PST 2012


Recipe Etch Coat Ch.A fails with "Max time at max power temperature" fault during the step "lower dome etch" at 1100C. I don't recall this step being there before - is it ok to run this step at a lower temperature?



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