December 2012 Archives by author

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Starting: Wed Dec 12 14:01:40 PST 2012
Ending: Sun Dec 23 08:52:21 PST 2012
Messages: 190

System is going back together Ted Berg
Current Epi status Ted Berg
Epi Status Ted Berg
Problem epi2 SNF 2012-11-08 03:11:44: Epi chamber error alsune at snf.stanford.edu
Comment epi2 SNF 2012-11-11 20:10:05: LLA cassette dirty alsune at snf.stanford.edu
Problem epi2 SNF 2012-10-02 19:58:39: dcs mfc faultet and is unstable andig at snf.stanford.edu
Problem epi2 SNF 2012-10-01 19:33:40: scrubber fault - wafers stuck andig at snf.stanford.edu
Problem epi2 SNF 2012-08-28 22:52:48: etch coat chA-Si fault and DCS not available andig at snf.stanford.edu
Problem epi2 SNF 2012-10-09 14:49:57: chA "isolated" andig at snf.stanford.edu
Comment epi2 SNF 2012-10-02 09:08:05: Will be in at 2pm andig at snf.stanford.edu
Problem epi2 SNF 2012-08-13 20:52:43: Both etchcoat-chA do fault out andig at snf.stanford.edu
Problem epi2 SNF 2012-09-21 21:44:22: etch-coat-cha-si faulted andig at snf.stanford.edu
Shutdown epi2 SNF 2012-09-09 08:24:11: wafer stuck in transfer chamber audet at snf.stanford.edu
Comment epi2 SNF 2012-11-11 21:37:51: Hot idle temperature issue cachang at snf.stanford.edu
Comment epi2 SNF 2012-08-21 14:35:56: heater contactor problem cachang at snf.stanford.edu
Problem epi2 SNF 2012-11-11 21:08:08: Hot idle chamber temperature cachang at snf.stanford.edu
Problem epi2 SNF 2012-08-16 09:25:49: Ch. A heater contactor error cachang at snf.stanford.edu
Shutdown epi2 SNF 2012-09-28 14:25:29: Ch A bulb failed in upper outer zone eenriquez at snf.stanford.edu
Comment epi2 SNF 2012-09-24 00:07:46: etch-coat-chA works fine eldwin at snf.stanford.edu
Comment epi2 SNF 2012-09-09 13:25:20: wafer retrieved from transfer chamber eldwin at snf.stanford.edu
Problem epi2 SNF 2012-11-21 15:32:50: Ch A bulb failed in upper outer zone eldwin at snf.stanford.edu
Shutdown epi2 SNF 2012-11-21 15:47:32: bulb failed; see above eldwin at snf.stanford.edu
Problem epi2 SNF 2012-08-23 09:18:11: Ch A DC Motor Hardware Interlock eldwin at snf.stanford.edu
Problem epi2 SNF 2012-08-16 10:05:56: Ch. A Heater Contacter Issue. eldwin at snf.stanford.edu
Problem epi2 SNF 2012-11-20 13:01:33: EtchCoat Ch.A fault eldwin at snf.stanford.edu
Problem epi2 SNF 2012-08-16 22:22:12: Heater Contactor problems eldwin at snf.stanford.edu
Comment epi2 SNF 2012-08-21 00:33:44: heater contactor update eldwin at snf.stanford.edu
Comment epi2 SNF 2012-08-22 18:27:22: found all dopant valves at the back open eldwin at snf.stanford.edu
Comment epi2 SNF 2012-08-16 10:39:44: etchcoat ok at 1070C eldwin at snf.stanford.edu
Problem epi2 SNF 2012-11-03 13:23:21: Pressure Setpoint Fault jasonlin at snf.stanford.edu
Problem epi2 SNF 2012-10-03 16:07:18: Disruption in DCS jasonlin at snf.stanford.edu
Problem epi2 SNF 2012-10-25 10:40:25: Particles on wafer backside jasonlin at snf.stanford.edu
Problem epi2 SNF 2012-10-09 21:55:11: Isolated State jasonlin at snf.stanford.edu
Shutdown epi2 SNF 2012-09-28 14:25:29: Ch A bulb failed in upper outer zone jasonlin at snf.stanford.edu
Problem epi2 SNF 2012-09-06 07:06:44: DC motor hardware interlock fault jthomp at snf.stanford.edu
Problem epi2 SNF 2012-11-11 22:07:36: Cannot bring up the chamber temperature junam at snf.stanford.edu
Problem epi2 SNF 2012-10-08 12:23:50: wafer stuck in Ca A, LLA door cannot be closed junam at snf.stanford.edu
Problem epi2 SNF 2012-10-29 02:21:57: bulb failure junam at snf.stanford.edu
Shutdown epi2 SNF 2012-11-11 22:58:21: temperature control issues junam at snf.stanford.edu
Problem epi2 SNF 2012-11-06 22:14:19: HCL deviation error: cannot run cleaning recipe junam at snf.stanford.edu
Problem epi2 SNF 2012-10-23 06:34:51: Ch A lower setpoint deviation fault kcbalram at snf.stanford.edu
Problem epi2 SNF 2012-11-26 11:44:38: Water leak detected kcbalram at snf.stanford.edu
Problem epi2 SNF 2012-08-23 09:18:11: Ch A DC Motor Hardware Interlock maurice at snf.stanford.edu
Comment epi2 SNF 2012-08-16 10:39:44: etchcoat ok at 1070C maurice at snf.stanford.edu
Problem epi2 SNF 2012-08-16 22:22:12: Heater Contactor problems maurice at snf.stanford.edu
Problem epi2 SNF 2012-08-16 09:25:49: Ch. A heater contactor error maurice at snf.stanford.edu
Shutdown epi2 SNF 2012-08-09 12:46:38: TGO issue maurice at snf.stanford.edu
Comment epi2 SNF 2012-11-16 12:29:04: GeH4 cylinder installed-Leak check maurice at snf.stanford.edu
Problem epi2 SNF 2012-10-03 15:56:14: need logsheets maurice at snf.stanford.edu
Problem epi2 SNF 2012-10-25 10:40:25: Particles on wafer backside maurice at snf.stanford.edu
Problem epi2 SNF 2012-07-21 13:42:27: Ch. A Heater Contactor Error maurice at snf.stanford.edu
Problem epi2 SNF 2012-10-09 14:49:57: chA "isolated" maurice at snf.stanford.edu
Comment epi2 SNF 2012-08-30 12:06:21: ran ge etch maurice at snf.stanford.edu
Comment epi2 SNF 2012-09-10 11:58:58: ran Si etch maurice at snf.stanford.edu
Problem epi2 SNF 2012-10-08 12:23:50: wafer stuck in Ca A, LLA door cannot be closed maurice at snf.stanford.edu
Problem epi2 SNF 2012-09-06 07:06:44: DC motor hardware interlock fault maurice at snf.stanford.edu
Shutdown epi2 SNF 2012-08-09 12:46:38: TGO issue maurice at snf.stanford.edu
Shutdown epi2 SNF 2012-10-10 15:32:05: H2 regulator is creeping maurice at snf.stanford.edu
Problem epi2 SNF 2012-11-20 13:01:33: EtchCoat Ch.A fault maurice at snf.stanford.edu
Problem epi2 SNF 2012-10-03 15:56:14: need logsheets maurice at snf.stanford.edu
Comment epi2 SNF 2012-11-16 07:30:42: ran Geetch coat no problem maurice at snf.stanford.edu
Shutdown epi2 SNF 2012-08-17 15:17:51: main scrubber after power glitch maurice at snf.stanford.edu
Shutdown epi2 SNF 2012-08-23 11:30:12: rotation problem maurice at snf.stanford.edu
Comment epi2 SNF 2012-07-24 11:42:42: ran "Mo ETCH" maurice at snf.stanford.edu
Comment epi2 SNF 2012-04-18 15:35:55: Ge etch program modified maurice at snf.stanford.edu
Shutdown epi2 SNF 2012-10-16 16:41:43: Replacing H2 regulator assembly maurice at snf.stanford.edu
Problem epi2 SNF 2012-08-16 10:05:56: Ch. A Heater Contacter Issue. maurice at snf.stanford.edu
Shutdown epi2 SNF 2012-09-09 08:24:11: wafer stuck in transfer chamber maurice at snf.stanford.edu
Comment epi2 SNF 2012-05-07 06:11:05: Ge Etch Coat Step 8 maurice at snf.stanford.edu
Problem epi2 SNF 2012-11-26 11:44:38: Water leak detected maurice at snf.stanford.edu
Comment epi2 SNF 2012-11-16 06:13:53: GeH4 should be here today maurice at snf.stanford.edu
Shutdown epi2 SNF 2012-10-09 02:03:52: TGO system in fault maurice at snf.stanford.edu
Problem epi2 SNF 2012-10-30 12:55:21: Large particles on wafer surface sclaussen at snf.stanford.edu
Comment epi2 SNF 2012-10-02 07:57:57: scrubber fault reset. seymour at snf.stanford.edu
Problem epi2 SNF 2012-11-21 15:32:50: Ch A bulb failed in upper outer zone seymour at snf.stanford.edu
Shutdown epi2 SNF 2012-11-21 15:47:32: bulb failed; see above seymour at snf.stanford.edu
Problem epi2 SNF 2012-10-01 18:38:11: Burnbox on old chamber ... shott at snf.stanford.edu
Problem epi2 SNF 2012-10-10 03:24:45: CHA offline taotang at snf.stanford.edu
Problem epi2 SNF 2012-10-23 06:34:51: Ch A lower setpoint deviation fault tberg at snf.stanford.edu
Problem epi2 SNF 2012-08-14 09:25:54: Problem with Silane panel tberg at snf.stanford.edu
Comment epi2 SNF 2012-10-02 09:08:05: Will be in at 2pm tberg at snf.stanford.edu
Shutdown epi2 SNF 2012-10-09 02:03:52: TGO system in fault tberg at snf.stanford.edu
Comment epi2 SNF 2012-11-11 21:37:51: Hot idle temperature issue tberg at snf.stanford.edu
Problem epi2 SNF 2012-11-11 22:07:36: Cannot bring up the chamber temperature tberg at snf.stanford.edu
Comment epi2 SNF 2012-09-09 13:25:20: wafer retrieved from transfer chamber tberg at snf.stanford.edu
Shutdown epi2 SNF 2012-09-06 11:21:06: rotation issues tberg at snf.stanford.edu
Problem epi2 SNF 2012-11-06 22:14:19: HCL deviation error: cannot run cleaning recipe tberg at snf.stanford.edu
Comment epi2 SNF 2012-10-10 09:42:43: Looks like H2 reg is creeping tberg at snf.stanford.edu
Comment epi2 SNF 2012-09-13 07:58:07: cylinder change completed tberg at snf.stanford.edu
Comment epi2 SNF 2012-09-14 09:18:31: Ran Chamber a etch coat Si tberg at snf.stanford.edu
Shutdown epi2 SNF 2012-10-10 06:49:30: cannot put chamber on line tberg at snf.stanford.edu
Shutdown epi2 SNF 2012-10-10 15:32:05: H2 regulator is creeping tberg at snf.stanford.edu
Shutdown epi2 SNF 2012-11-30 07:35:58: applied work tberg at snf.stanford.edu
Comment epi2 SNF 2012-10-22 12:08:15: HCl changed to other cylinder tberg at snf.stanford.edu
Comment epi2 SNF 2012-09-12 09:06:44: ran Geetch coat for checkout tberg at snf.stanford.edu
Shutdown epi2 SNF 2012-12-04 11:22:28: pm in progress tberg at snf.stanford.edu
Comment epi2 SNF 2012-08-06 09:21:16: Ran GeEtchcoat for checkout tberg at snf.stanford.edu
Shutdown epi2 SNF 2012-11-30 07:35:58: applied work tberg at snf.stanford.edu
Comment epi2 SNF 2012-11-02 13:45:11: Do NOT Disable tberg at snf.stanford.edu
Comment epi2 SNF 2012-11-08 10:59:30: Running long leak rate tberg at snf.stanford.edu
Comment epi2 SNF 2012-10-11 12:59:39: Running Epi in Community service mode tberg at snf.stanford.edu
Comment epi2 SNF 2012-08-09 08:01:38: Ran Etchcoat for checkout tberg at snf.stanford.edu
Comment epi2 SNF 2012-12-05 14:01:55: no progress on PM tberg at snf.stanford.edu
Comment epi2 SNF 2012-10-09 13:47:25: Changed backup DCS Cylinder tberg at snf.stanford.edu
Comment epi2 SNF 2012-08-22 18:27:22: found all dopant valves at the back open tberg at snf.stanford.edu
Comment epi2 SNF 2012-09-05 09:11:43: ran Geetch coat for checkout tberg at snf.stanford.edu
Problem epi2 SNF 2012-10-02 19:58:39: dcs mfc faultet and is unstable tberg at snf.stanford.edu
Comment epi2 SNF 2012-09-12 09:06:44: ran Geetch coat for checkout tberg at snf.stanford.edu
Problem epi2 SNF 2012-10-01 19:33:40: scrubber fault - wafers stuck tberg at snf.stanford.edu
Problem epi2 SNF 2012-10-10 03:24:45: CHA offline tberg at snf.stanford.edu
Problem epi2 SNF 2012-09-13 05:55:50: 1% B2H6 change tberg at snf.stanford.edu
Comment epi2 SNF 2012-10-09 13:47:25: Changed backup DCS Cylinder tberg at snf.stanford.edu
Comment epi2 SNF 2012-11-08 12:21:25: long leak rate results tberg at snf.stanford.edu
Comment epi2 SNF 2012-09-24 00:07:46: etch-coat-chA works fine tberg at snf.stanford.edu
Problem epi2 SNF 2012-10-29 02:21:57: bulb failure tberg at snf.stanford.edu
Comment epi2 SNF 2012-09-20 08:14:53: ran GEetch coat for checkout tberg at snf.stanford.edu
Comment epi2 SNF 2012-09-24 06:12:27: releasing reservations-GeH4 still OK tberg at snf.stanford.edu
Shutdown epi2 SNF 2012-08-17 15:17:51: main scrubber after power glitch tberg at snf.stanford.edu
Comment epi2 SNF 2012-09-19 08:05:29: The Indicator for status is functional tberg at snf.stanford.edu
Comment epi2 SNF 2012-10-10 09:42:43: Looks like H2 reg is creeping tberg at snf.stanford.edu
Comment epi2 SNF 2012-09-14 09:18:31: Ran Chamber a etch coat Si tberg at snf.stanford.edu
Comment epi2 SNF 2012-09-27 08:18:04: Ran GEetch coat for checkout tberg at snf.stanford.edu
Comment epi2 SNF 2012-09-10 11:58:58: ran Si etch tberg at snf.stanford.edu
Comment epi2 SNF 2012-09-24 06:12:27: releasing reservations-GeH4 still OK tberg at snf.stanford.edu
Comment epi2 SNF 2012-11-12 12:31:55: GeH4 is very low. Do not run critical runs tberg at snf.stanford.edu
Problem epi2 SNF 2012-10-10 12:36:56: H2 regulator creeps tberg at snf.stanford.edu
Problem epi2 SNF 2012-10-03 08:15:47: GERMANE cylinder changed tberg at snf.stanford.edu
Comment epi2 SNF 2012-09-13 07:58:07: cylinder change completed tberg at snf.stanford.edu
Comment epi2 SNF 2012-08-31 09:47:05: ran 2 etches tberg at snf.stanford.edu
Comment epi2 SNF 2012-11-12 12:31:55: GeH4 is very low. Do not run critical runs tberg at snf.stanford.edu
Problem epi2 SNF 2012-09-13 05:55:50: 1% B2H6 change tberg at snf.stanford.edu
Comment epi2 SNF 2012-10-11 12:59:39: Running Epi in Community service mode tberg at snf.stanford.edu
Comment epi2 SNF 2012-11-16 06:13:53: GeH4 should be here today tberg at snf.stanford.edu
Comment epi2 SNF 2012-10-26 14:19:54: Changed reg assy still creeps tberg at snf.stanford.edu
Shutdown epi2 SNF 2012-09-06 11:21:06: rotation issues tberg at snf.stanford.edu
Comment epi2 SNF 2012-12-11 06:27:49: Not much progress tberg at snf.stanford.edu
Comment epi2 SNF 2012-11-02 13:45:11: Do NOT Disable tberg at snf.stanford.edu
Comment epi2 SNF 2012-09-27 08:18:04: Ran GEetch coat for checkout tberg at snf.stanford.edu
Comment epi2 SNF 2012-09-21 10:05:46: GeH4 is getting low tberg at snf.stanford.edu
Comment epi2 SNF 2012-08-21 14:35:56: heater contactor problem tberg at snf.stanford.edu
Problem epi2 SNF 2012-11-03 13:23:21: Pressure Setpoint Fault tberg at snf.stanford.edu
Problem epi2 SNF 2012-11-08 03:11:44: Epi chamber error tberg at snf.stanford.edu
Problem epi2 SNF 2012-08-29 13:50:31: No PH3 until tomorrow tberg at snf.stanford.edu
Comment epi2 SNF 2012-11-16 07:30:42: ran Geetch coat no problem tberg at snf.stanford.edu
Comment epi2 SNF 2012-09-05 09:11:43: ran Geetch coat for checkout tberg at snf.stanford.edu
Comment epi2 SNF 2012-08-30 12:06:21: ran ge etch tberg at snf.stanford.edu
Shutdown epi2 SNF 2012-10-16 16:41:43: Replacing H2 regulator assembly tberg at snf.stanford.edu
Problem epi2 SNF 2012-10-10 12:36:56: H2 regulator creeps tberg at snf.stanford.edu
Problem epi2 SNF 2012-10-01 18:38:11: Burnbox on old chamber ... tberg at snf.stanford.edu
Problem epi2 SNF 2012-09-21 21:44:22: etch-coat-cha-si faulted tberg at snf.stanford.edu
Shutdown epi2 SNF 2012-10-29 06:21:05: bad lamps tberg at snf.stanford.edu
Problem epi2 SNF 2012-08-29 13:50:31: No PH3 until tomorrow tberg at snf.stanford.edu
Comment epi2 SNF 2012-09-19 08:05:29: The Indicator for status is functional tberg at snf.stanford.edu
Problem epi2 SNF 2012-10-28 12:25:19: Error message tberg at snf.stanford.edu
Comment epi2 SNF 2012-10-02 07:57:57: scrubber fault reset. tberg at snf.stanford.edu
Comment epi2 SNF 2012-10-22 12:08:15: HCl changed to other cylinder tberg at snf.stanford.edu
Comment epi2 SNF 2012-08-09 08:01:38: Ran Etchcoat for checkout tberg at snf.stanford.edu
Problem epi2 SNF 2012-10-03 16:07:18: Disruption in DCS tberg at snf.stanford.edu
Comment epi2 SNF 2012-09-21 10:05:46: GeH4 is getting low tberg at snf.stanford.edu
Comment epi2 SNF 2012-08-31 09:47:05: ran 2 etches tberg at snf.stanford.edu
Comment epi2 SNF 2012-10-31 07:16:01: Ran Geetch coat for checkout tberg at snf.stanford.edu
Comment epi2 SNF 2012-10-10 08:32:20: FS will be in around Noon tberg at snf.stanford.edu
Comment epi2 SNF 2012-11-16 12:29:04: GeH4 cylinder installed-Leak check tberg at snf.stanford.edu
Comment epi2 SNF 2012-08-24 06:01:27: Applied was in tberg at snf.stanford.edu
Comment epi2 SNF 2012-12-06 11:58:19: lamps replaced in lower module tberg at snf.stanford.edu
Shutdown epi2 SNF 2012-11-11 22:58:21: temperature control issues tberg at snf.stanford.edu
Comment epi2 SNF 2012-10-31 07:16:01: Ran Geetch coat for checkout tberg at snf.stanford.edu
Comment epi2 SNF 2012-08-24 06:01:27: Applied was in tberg at snf.stanford.edu
Comment epi2 SNF 2012-08-06 09:21:16: Ran GeEtchcoat for checkout tberg at snf.stanford.edu
Problem epi2 SNF 2012-10-09 21:55:11: Isolated State tberg at snf.stanford.edu
Comment epi2 SNF 2012-08-21 00:33:44: heater contactor update tberg at snf.stanford.edu
Problem epi2 SNF 2012-11-11 21:08:08: Hot idle chamber temperature tberg at snf.stanford.edu
Comment epi2 SNF 2012-09-20 08:14:53: ran GEetch coat for checkout tberg at snf.stanford.edu
Comment epi2 SNF 2012-10-10 08:32:20: FS will be in around Noon tberg at snf.stanford.edu
Problem epi2 SNF 2012-08-13 20:52:43: Both etchcoat-chA do fault out tberg at snf.stanford.edu
Shutdown epi2 SNF 2012-10-29 06:21:05: bad lamps tberg at snf.stanford.edu
Comment epi2 SNF 2012-12-12 14:00:28: System going back together tberg at snf.stanford.edu
Comment epi2 SNF 2012-11-12 10:42:09: Cassettes ordered tberg at snf.stanford.edu
Comment epi2 SNF 2012-12-18 10:08:08: Applied is here tberg at snf.stanford.edu
Problem epi2 SNF 2012-10-03 08:15:47: GERMANE cylinder changed tberg at snf.stanford.edu
Comment epi2 SNF 2012-09-14 10:15:39: No On display tberg at snf.stanford.edu
Problem epi2 SNF 2012-08-28 22:52:48: etch coat chA-Si fault and DCS not available tberg at snf.stanford.edu
Comment epi2 SNF 2012-09-14 10:15:39: No On display tberg at snf.stanford.edu
Comment epi2 SNF 2012-11-30 13:20:02: Major PM on Monday tberg at snf.stanford.edu
Shutdown epi2 SNF 2012-08-23 11:30:12: rotation problem tberg at snf.stanford.edu
Comment epi2 SNF 2012-10-26 14:19:54: Changed reg assy still creeps tberg at snf.stanford.edu
Shutdown epi2 SNF 2012-10-10 06:49:30: cannot put chamber on line tberg at snf.stanford.edu
Problem epi2 SNF 2012-08-14 09:25:54: Problem with Silane panel tberg at snf.stanford.edu
Problem epi2 SNF 2012-10-28 12:25:19: Error message yjhuo at snf.stanford.edu
[epi2-pcs] Comment epi2 SNF 2012-12-21 11:13:24: Epi is back together and pumping tberg at stanford.edu

Last message date: Sun Dec 23 08:52:21 PST 2012
Archived on: Sun Dec 23 08:53:03 PST 2012

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