From seymour at snf.stanford.edu Tue Jul 3 08:09:51 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 3 Jul 2012 08:09:51 -0700 Subject: Problem epi2 SNF 2012-07-03 08:09:50: germane cylinder needs to be changed Message-ID: tool is up for silane depositions. From seymour at snf.stanford.edu Tue Jul 3 09:52:37 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 3 Jul 2012 09:52:37 -0700 Subject: Comment tylanbpsg SNF 2012-05-22 14:59:53: created new LTO disk Message-ID: cylinder has been changed and leak check passed From seymour at snf.stanford.edu Tue Jul 3 09:53:07 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 3 Jul 2012 09:53:07 -0700 Subject: Comment epi2 SNF 2012-07-03 09:53:06: germane cylinder changed ok to run Message-ID: From tberg at snf.stanford.edu Thu Jul 5 06:25:40 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 5 Jul 2012 06:25:40 -0700 Subject: Problem epi2 SNF 2012-07-03 08:09:50: germane cylinder needs to be changed Message-ID: Cylinder changed Germane is OK now From junam at snf.stanford.edu Thu Jul 5 12:21:41 2012 From: junam at snf.stanford.edu (junam at snf.stanford.edu) Date: Thu, 5 Jul 2012 12:21:41 -0700 Subject: Comment epi2 SNF 2012-07-05 12:21:41: Pressure setpoint deviation error Message-ID: During GE ETCH COAT, pressure setpoint deviation error occurred. Since I was not by the tool, not sure which step gave the error. From eldwin at snf.stanford.edu Fri Jul 6 09:06:10 2012 From: eldwin at snf.stanford.edu (eldwin at snf.stanford.edu) Date: Fri, 6 Jul 2012 09:06:10 -0700 Subject: Problem epi2 SNF 2012-07-06 09:06:09: Ch A Heater Contacter Off Message-ID: Gave the error and aborted during process, but was able to reset and run an etch coat after. From kcbalram at snf.stanford.edu Sun Jul 8 10:00:30 2012 From: kcbalram at snf.stanford.edu (kcbalram at snf.stanford.edu) Date: Sun, 8 Jul 2012 10:00:30 -0700 Subject: Problem epi2 SNF 2012-07-08 10:00:29: Error: Main scrubber fault Message-ID: tried to reset chamber A to run a Ge etch coat, got an error saying "Main scrubber fault, manual gas flows are not allowed" Krishna From tberg at snf.stanford.edu Mon Jul 9 06:25:00 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 9 Jul 2012 06:25:00 -0700 Subject: Shutdown epi2 SNF 2012-07-09 06:24:59: scrubber fault Message-ID: From tberg at snf.stanford.edu Mon Jul 9 09:25:10 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 9 Jul 2012 09:25:10 -0700 Subject: Shutdown epi2 SNF 2012-07-09 06:24:59: scrubber fault Message-ID: cleaned scrubber and burn box exhausts, ran geetchcoat no problem From tberg at snf.stanford.edu Mon Jul 9 09:25:30 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 9 Jul 2012 09:25:30 -0700 Subject: Problem epi2 SNF 2012-07-06 09:06:09: Ch A Heater Contacter Off Message-ID: noted From tberg at snf.stanford.edu Mon Jul 9 09:25:39 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 9 Jul 2012 09:25:39 -0700 Subject: Problem epi2 SNF 2012-07-08 10:00:29: Error: Main scrubber fault Message-ID: cleaned scrubber and burn box exhausts, ran geetchcoat no problem From tberg at snf.stanford.edu Mon Jul 9 09:26:20 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 9 Jul 2012 09:26:20 -0700 Subject: Comment epi2 SNF 2012-07-03 09:53:06: germane cylinder changed ok to run Message-ID: noted From tberg at snf.stanford.edu Mon Jul 9 09:26:39 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 9 Jul 2012 09:26:39 -0700 Subject: Comment epi2 SNF 2012-07-05 12:21:41: Pressure setpoint deviation error Message-ID: ran ok after From tberg at stanford.edu Mon Jul 9 09:53:23 2012 From: tberg at stanford.edu (Ted Berg) Date: Mon, 09 Jul 2012 09:53:23 -0700 Subject: Epi is back up Message-ID: <4FFB0C83.4010608@stanford.edu> Cleaned scrubber and burn box exhaust, ran geetch coat Epi is back up From dindin at snf.stanford.edu Wed Jul 11 15:39:21 2012 From: dindin at snf.stanford.edu (dindin at snf.stanford.edu) Date: Wed, 11 Jul 2012 15:39:21 -0700 Subject: Comment epi2 SNF 2012-07-11 15:39:20: D-DOP2 Message-ID: Cannot change flow rate? From tberg at snf.stanford.edu Tue Jul 17 13:01:24 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 17 Jul 2012 13:01:24 -0700 Subject: Comment epi2 SNF 2012-07-17 13:01:24: B2H6 low concentration Is Empty Message-ID: Cylinder should be here today From tberg at snf.stanford.edu Wed Jul 18 06:07:13 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 18 Jul 2012 06:07:13 -0700 Subject: Problem epi2 SNF 2012-06-20 10:07:49: DOP2 flow error Message-ID: 100 PPM B2H6 cylinder has been replaced , leak checked and is back on line From tberg at snf.stanford.edu Wed Jul 18 06:07:22 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 18 Jul 2012 06:07:22 -0700 Subject: Problem epi2 SNF 2012-06-20 10:26:12: 100 PPM B2H6 is almost Empty Message-ID: 100 PPM B2H6 cylinder has been replaced , leak checked and is back on line From tberg at snf.stanford.edu Wed Jul 18 06:07:33 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 18 Jul 2012 06:07:33 -0700 Subject: Comment epi2 SNF 2012-06-29 06:51:01: Looks like low concentration B2H6 may be a couple more weeks Message-ID: 100 PPM B2H6 cylinder has been replaced , leak checked and is back on line From tberg at snf.stanford.edu Wed Jul 18 06:07:42 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 18 Jul 2012 06:07:42 -0700 Subject: Comment epi2 SNF 2012-07-11 15:39:20: D-DOP2 Message-ID: 100 PPM B2H6 cylinder has been replaced , leak checked and is back on line From tberg at snf.stanford.edu Wed Jul 18 06:07:52 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 18 Jul 2012 06:07:52 -0700 Subject: Comment epi2 SNF 2012-07-17 13:01:24: B2H6 low concentration Is Empty Message-ID: 100 PPM B2H6 cylinder has been replaced , leak checked and is back on line From tberg at stanford.edu Wed Jul 18 06:08:37 2012 From: tberg at stanford.edu (Ted Berg) Date: Wed, 18 Jul 2012 06:08:37 -0700 Subject: 100 PPM B2H6 is back on line Message-ID: <5006B555.4060204@stanford.edu> 100 PPM B2H6 cylinder has been replaced , leak checked and is back on line From raisul at snf.stanford.edu Thu Jul 19 07:05:42 2012 From: raisul at snf.stanford.edu (raisul at snf.stanford.edu) Date: Thu, 19 Jul 2012 07:05:42 -0700 Subject: Problem epi2 SNF 2012-07-19 07:05:41: Chamber A shown to be Isolated Message-ID: The recipe run was ok from the wafer history. When I came back I found a yellow warning message that chamber is isolated. Then after removing the wafers when I tried to change it back to inert idle mode, it gives another yellow warning message: "Chamber A not in right conditions to change to selected idle mode now." From raisul at snf.stanford.edu Thu Jul 19 07:15:33 2012 From: raisul at snf.stanford.edu (raisul at snf.stanford.edu) Date: Thu, 19 Jul 2012 07:15:33 -0700 Subject: Comment epi2 SNF 2012-07-19 07:15:33: Could not run Ge ETCH COAT after recipe run Message-ID: After my recipe run, it started to run the cleaning recipe by itself. But there is an error message that "Chamber A pressure setpoint deviation fault". It stopped the cleaning recipe and put the chamber in offline state. Then I made it online. From tberg at snf.stanford.edu Thu Jul 19 09:01:43 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 19 Jul 2012 09:01:43 -0700 Subject: Problem epi2 SNF 2012-07-19 07:05:41: Chamber A shown to be Isolated Message-ID: Ran Etch coat no problem From tberg at snf.stanford.edu Thu Jul 19 09:02:15 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 19 Jul 2012 09:02:15 -0700 Subject: Comment epi2 SNF 2012-07-19 07:15:33: Could not run Ge ETCH COAT after recipe run Message-ID: Ran etch coat no problem From jthomp at snf.stanford.edu Thu Jul 19 11:32:35 2012 From: jthomp at snf.stanford.edu (jthomp at snf.stanford.edu) Date: Thu, 19 Jul 2012 11:32:35 -0700 Subject: Problem epi2 SNF 2012-07-19 11:32:34: The pen doesn't seem to be working Message-ID: From tberg at snf.stanford.edu Thu Jul 19 11:50:27 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 19 Jul 2012 11:50:27 -0700 Subject: Problem epi2 SNF 2012-07-19 11:32:34: The pen doesn't seem to be working Message-ID: control is in the rear From tberg at snf.stanford.edu Thu Jul 19 11:52:11 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 19 Jul 2012 11:52:11 -0700 Subject: Comment epi2 SNF 2012-07-19 11:52:10: replaced exhaust lines from scrubber to burnbox Message-ID: replaced exhaust lines from scrubber to burnbox. system is back on line From dongrip at snf.stanford.edu Fri Jul 20 09:17:17 2012 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Fri, 20 Jul 2012 09:17:17 -0700 Subject: Problem epi2 SNF 2012-07-20 09:17:16: Lower temperature setpoint deviation fault Message-ID: I encountered the lower temperature setpoint deviation fault once during Ge etch coat, and the system went to in red. I ran the Ge etch coat again, and no problem. From eldwin at snf.stanford.edu Sat Jul 21 13:42:28 2012 From: eldwin at snf.stanford.edu (eldwin at snf.stanford.edu) Date: Sat, 21 Jul 2012 13:42:28 -0700 Subject: Problem epi2 SNF 2012-07-21 13:42:27: Ch. A Heater Contactor Error Message-ID: Aborted process a few minutes into recipe at 1100C. Same error occurs after retrying From junam at snf.stanford.edu Sat Jul 21 23:22:16 2012 From: junam at snf.stanford.edu (junam at snf.stanford.edu) Date: Sat, 21 Jul 2012 23:22:16 -0700 Subject: Problem epi2 SNF 2012-07-21 23:22:15: DCS flow deviation 199 % Message-ID: It seems DCS gas gives error From tberg at snf.stanford.edu Mon Jul 23 07:18:43 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 23 Jul 2012 07:18:43 -0700 Subject: Problem epi2 SNF 2012-07-21 23:22:15: DCS flow deviation 199 % Message-ID: Ran Geetch coat , DCS flowed fine, No contactor issues From tberg at snf.stanford.edu Mon Jul 23 07:20:00 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 23 Jul 2012 07:20:00 -0700 Subject: Comment epi2 SNF 2012-07-23 07:19:59: Ran GeEtchcoat no problem Message-ID: No contactor issues or DCS flow issues will keep open for observation From junam at snf.stanford.edu Mon Jul 23 22:50:10 2012 From: junam at snf.stanford.edu (junam at snf.stanford.edu) Date: Mon, 23 Jul 2012 22:50:10 -0700 Subject: Comment epi2 SNF 2012-07-23 22:50:10: pressure setpoint deviation error during Ge etch coat Message-ID: From junam at snf.stanford.edu Mon Jul 23 22:54:47 2012 From: junam at snf.stanford.edu (junam at snf.stanford.edu) Date: Mon, 23 Jul 2012 22:54:47 -0700 Subject: Comment epi2 SNF 2012-07-23 22:54:46: pressure setpoint deviation error during Ge etch coat Message-ID: After running my first recipe, during Ge etch coat, pressure setpoint deviation error occurred. I re-set the chamber, and ran ge etch coat again, but encountered the same error. From tberg at snf.stanford.edu Tue Jul 24 06:43:57 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 24 Jul 2012 06:43:57 -0700 Subject: Comment epi2 SNF 2012-07-23 22:50:10: pressure setpoint deviation error during Ge etch coat Message-ID: Ran GeEtch coat with no issues From tberg at snf.stanford.edu Tue Jul 24 06:44:07 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 24 Jul 2012 06:44:07 -0700 Subject: Comment epi2 SNF 2012-07-23 22:54:46: pressure setpoint deviation error during Ge etch coat Message-ID: Ran GeEtch coat with no issues From tberg at snf.stanford.edu Tue Jul 24 06:44:43 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 24 Jul 2012 06:44:43 -0700 Subject: Problem epi2 SNF 2012-07-20 09:17:16: Lower temperature setpoint deviation fault Message-ID: Ran GeEtch coat with no issues From maurice at snf.stanford.edu Tue Jul 24 11:42:42 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 24 Jul 2012 11:42:42 -0700 Subject: Comment epi2 SNF 2012-07-24 11:42:42: ran "Mo ETCH" Message-ID: Andig reported active idle temp ~720c. It should be ~800c. Run long etch to clean up chamber. From dongrip at snf.stanford.edu Wed Jul 25 03:46:30 2012 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Wed, 25 Jul 2012 03:46:30 -0700 Subject: Problem epi2 SNF 2012-07-25 03:46:29: Heater Contacter problems Message-ID: Heater contactor problems occurred from time to time when running Ge etch coat. Particularly, in the middle of the step 8 (100 sec at 1100C), it happens. It seems similar to the things happened at the beginning of this year. From tberg at stanford.edu Fri Jul 27 06:25:31 2012 From: tberg at stanford.edu (Ted Berg) Date: Fri, 27 Jul 2012 06:25:31 -0700 Subject: GeH4 is getting low Message-ID: <501296CB.2090706@stanford.edu> Hello All, Just a warning, GeH4 is getting low. if you are going to run a *critical run* check the gauge reader Node 22 for Germane pressure. URL is: http://snf-gaugereader/wgrwebapp/Default_WGR.aspx It will b e down for 24 hours after we change it. Ted -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Jul 27 06:27:13 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 27 Jul 2012 06:27:13 -0700 Subject: Problem epi2 SNF 2012-07-27 06:27:12: GeH4 is gettin low Message-ID: Hello All, Just a warning, GeH4 is getting low. if you are going to run a critical run check the gauge reader Node 22 for Germane pressure. URL is: http://snf-gaugereader/wgrwebapp/Default_WGR.aspx It will b e down for 24 hours after we change it. Ted From tberg at snf.stanford.edu Fri Jul 27 08:30:09 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 27 Jul 2012 08:30:09 -0700 Subject: Problem epi2 SNF 2012-07-27 08:30:08: GeH4 is Empty changing cylinder Message-ID: GeH4 is Empty changing cylinder From tberg at snf.stanford.edu Fri Jul 27 08:30:37 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 27 Jul 2012 08:30:37 -0700 Subject: Problem epi2 SNF 2012-07-27 06:27:12: GeH4 is gettin low Message-ID: Cylinder is empty changing cylinder From tberg at snf.stanford.edu Fri Jul 27 08:54:42 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 27 Jul 2012 08:54:42 -0700 Subject: Comment epi2 SNF 2012-07-27 08:54:42: GeH4 is changed in leak check Message-ID: GeH4 is changed in leak check From tberg at snf.stanford.edu Fri Jul 27 13:08:31 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 27 Jul 2012 13:08:31 -0700 Subject: Problem epi2 SNF 2012-07-27 08:30:08: GeH4 is Empty changing cylinder Message-ID: Cylinder changed, leak checked, Flowed manually at the tool just fine GeH4 is back on line From tberg at snf.stanford.edu Fri Jul 27 13:08:45 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 27 Jul 2012 13:08:45 -0700 Subject: Comment epi2 SNF 2012-07-27 08:54:42: GeH4 is changed in leak check Message-ID: Cylinder changed, leak checked, Flowed manually at the tool just fine GeH4 is back on line From tberg at snf.stanford.edu Fri Jul 27 13:09:14 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 27 Jul 2012 13:09:14 -0700 Subject: Comment epi2 SNF 2012-07-19 11:52:10: replaced exhaust lines from scrubber to burnbox Message-ID: completed From tberg at stanford.edu Fri Jul 27 13:10:25 2012 From: tberg at stanford.edu (Ted Berg) Date: Fri, 27 Jul 2012 13:10:25 -0700 Subject: Cylinder change of GeH4 completed Message-ID: <5012F5B1.90207@stanford.edu> Cylinder changed, leak checked, Flowed manually at the tool just fine GeH4 is back on line From apal at snf.stanford.edu Sun Jul 29 16:55:06 2012 From: apal at snf.stanford.edu (apal at snf.stanford.edu) Date: Sun, 29 Jul 2012 16:55:06 -0700 Subject: Problem epi2 SNF 2012-07-29 16:55:05: Chamber Bulb Failure Message-ID: Cannot go from cold idle to hot idle state From tberg at snf.stanford.edu Mon Jul 30 06:22:43 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 30 Jul 2012 06:22:43 -0700 Subject: Comment epi2 SNF 2012-07-30 06:22:42: changing lamps Message-ID: From tberg at snf.stanford.edu Mon Jul 30 08:22:11 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 30 Jul 2012 08:22:11 -0700 Subject: Problem epi2 SNF 2012-07-29 16:55:05: Chamber Bulb Failure Message-ID: Replaced bad bulbs, Ran 2 etch coats no problem From tberg at snf.stanford.edu Mon Jul 30 08:22:24 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 30 Jul 2012 08:22:24 -0700 Subject: Comment epi2 SNF 2012-07-30 06:22:42: changing lamps Message-ID: Replaced bad bulbs, Ran 2 etch coats no problem From tberg at snf.stanford.edu Mon Jul 30 08:22:34 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 30 Jul 2012 08:22:34 -0700 Subject: Problem epi2 SNF 2012-07-25 03:46:29: Heater Contacter problems Message-ID: Replaced bad bulbs, Ran 2 etch coats no problem From tberg at snf.stanford.edu Mon Jul 30 08:22:45 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 30 Jul 2012 08:22:45 -0700 Subject: Comment epi2 SNF 2012-07-23 07:19:59: Ran GeEtchcoat no problem Message-ID: noted