From itot at snf.stanford.edu Fri Jun 1 06:47:07 2012 From: itot at snf.stanford.edu (itot at snf.stanford.edu) Date: Fri, 1 Jun 2012 06:47:07 -0700 Subject: Problem epi2 SNF 2012-06-01 06:47:06: no wafer on blade Message-ID: wafer does not go back. (Load lock B there is no wafer on blade) From itot at snf.stanford.edu Fri Jun 1 07:33:00 2012 From: itot at snf.stanford.edu (itot at snf.stanford.edu) Date: Fri, 1 Jun 2012 07:33:00 -0700 Subject: Comment epi2 SNF 2012-06-01 07:33:00: cancel my problem Message-ID: Please remove my problem. I could resolve it by myself. From tberg at snf.stanford.edu Fri Jun 1 07:55:06 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 1 Jun 2012 07:55:06 -0700 Subject: Problem epi2 SNF 2012-06-01 06:47:06: no wafer on blade Message-ID: user resolved From tberg at snf.stanford.edu Fri Jun 1 07:55:16 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 1 Jun 2012 07:55:16 -0700 Subject: Comment epi2 SNF 2012-06-01 07:33:00: cancel my problem Message-ID: noted From tberg at snf.stanford.edu Fri Jun 1 08:33:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 1 Jun 2012 08:33:21 -0700 Subject: Problem epi2 SNF 2012-05-31 19:27:01: vacuum wand is broken. Message-ID: Replaced wand tip From audet at snf.stanford.edu Thu Jun 7 02:51:58 2012 From: audet at snf.stanford.edu (audet at snf.stanford.edu) Date: Thu, 7 Jun 2012 02:51:58 -0700 Subject: Problem epi2 SNF 2012-06-07 02:51:58: vacuum wand holder Message-ID: The vacuum wand holder appears to have fallen off the wall. From tberg at snf.stanford.edu Thu Jun 7 08:27:31 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 7 Jun 2012 08:27:31 -0700 Subject: Problem epi2 SNF 2012-06-07 02:51:58: vacuum wand holder Message-ID: replaced wand holder From tberg at snf.stanford.edu Thu Jun 7 08:28:07 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 7 Jun 2012 08:28:07 -0700 Subject: Comment epi2 SNF 2012-05-29 15:20:29: flow SiH4 Message-ID: sih4 is good now From tberg at snf.stanford.edu Thu Jun 7 08:28:20 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 7 Jun 2012 08:28:20 -0700 Subject: Comment epi2 SNF 2012-05-18 13:49:37: Replaced Filter and MFC in Silane channel Message-ID: sih4 is good now From maurice at snf.stanford.edu Wed Jun 13 15:47:30 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Wed, 13 Jun 2012 15:47:30 -0700 Subject: Shutdown epi2 SNF 2012-06-13 15:47:28: pin holes in exhaust Message-ID: pin holes in exhaust between burnbox and scrubber (in basement) above scrubber, 7 ft above floor From tberg at snf.stanford.edu Thu Jun 14 10:37:47 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 14 Jun 2012 10:37:47 -0700 Subject: Shutdown epi2 SNF 2012-06-13 15:47:28: pin holes in exhaust Message-ID: Replaced holy line ran geetch coat no problem From tberg at stanford.edu Thu Jun 14 10:39:02 2012 From: tberg at stanford.edu (Ted Berg) Date: Thu, 14 Jun 2012 10:39:02 -0700 Subject: epi is back up Message-ID: <4FDA21B6.50007@stanford.edu> holy line replaced. ran etch coat From audet at snf.stanford.edu Mon Jun 18 14:10:26 2012 From: audet at snf.stanford.edu (audet at snf.stanford.edu) Date: Mon, 18 Jun 2012 14:10:26 -0700 Subject: Problem epi2 SNF 2012-06-18 14:10:26: HCL out? Message-ID: Received error: HCL flow deviated by 100% while running Ge_etch_coat From tberg at snf.stanford.edu Mon Jun 18 14:17:59 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 18 Jun 2012 14:17:59 -0700 Subject: Problem epi2 SNF 2012-06-18 14:10:26: HCL out? Message-ID: changed Hcl to backup cylinder From maurice at snf.stanford.edu Mon Jun 18 16:34:50 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 18 Jun 2012 16:34:50 -0700 Subject: Shutdown epi2 SNF 2012-06-18 16:34:49: No HCl flow Message-ID: From tberg at snf.stanford.edu Tue Jun 19 08:51:16 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 19 Jun 2012 08:51:16 -0700 Subject: Shutdown epi2 SNF 2012-06-18 16:34:49: No HCl flow Message-ID: Changed b side cylinder did purge on both. A side is back on line flowing fine. Ran geetchcoat no problem From sclaussen at snf.stanford.edu Wed Jun 20 10:07:50 2012 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Wed, 20 Jun 2012 10:07:50 -0700 Subject: Problem epi2 SNF 2012-06-20 10:07:49: DOP2 flow error Message-ID: DOP2 errored out last night during a wafer. Can someone check the canister on it? From tberg at snf.stanford.edu Wed Jun 20 10:26:12 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 20 Jun 2012 10:26:12 -0700 Subject: Problem epi2 SNF 2012-06-20 10:26:12: 100 PPM B2H6 is almost Empty Message-ID: 100 PPM B2H6 is almost Empty. New Cylinder is on Order ETA is at least a week out From mtang at snf.stanford.edu Sat Jun 23 13:18:40 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Sat, 23 Jun 2012 13:18:40 -0700 Subject: Shutdown epi2 SNF 2012-06-23 13:18:39: Process gas fire detectors & Burn box down Message-ID: Issues remain following scrubber exhaust maintenance today: 1. Fire eyes on the pyrophorics in the vault cabinets cannot be reset. 2. Burn boxes for epi2 needs to be checked out and restarted. No process gases and no exhaust, so system cannot be run. From tberg at snf.stanford.edu Mon Jun 25 06:50:18 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 25 Jun 2012 06:50:18 -0700 Subject: Shutdown epi2 SNF 2012-06-23 13:18:39: Process gas fire detectors & Burn box down Message-ID: Reset burn box, exhaust is back on reset HCl and DCS, Running \ GeETCHcoat now From tberg at snf.stanford.edu Mon Jun 25 06:51:14 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 25 Jun 2012 06:51:14 -0700 Subject: Problem epi2 SNF 2012-06-25 06:51:14: No Silane at this time Message-ID: Still issues with fire eyes-no silane at this time. From tberg at snf.stanford.edu Mon Jun 25 10:57:55 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 25 Jun 2012 10:57:55 -0700 Subject: Problem epi2 SNF 2012-06-25 06:51:14: No Silane at this time Message-ID: Silane back on From raisul at snf.stanford.edu Fri Jun 29 00:52:38 2012 From: raisul at snf.stanford.edu (raisul at snf.stanford.edu) Date: Fri, 29 Jun 2012 00:52:38 -0700 Subject: Comment epi2 SNF 2012-06-29 00:52:37: Epi2 can not be taken back to inert idle state Message-ID: It always remains in the active idle state and shows some warning message. From tberg at snf.stanford.edu Fri Jun 29 06:49:05 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 29 Jun 2012 06:49:05 -0700 Subject: Comment epi2 SNF 2012-06-29 00:52:37: Epi2 can not be taken back to inert idle state Message-ID: It is fine back in inert-no problem found. MAYBE TRIED TOO EARLY From tberg at snf.stanford.edu Fri Jun 29 06:51:02 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 29 Jun 2012 06:51:02 -0700 Subject: Comment epi2 SNF 2012-06-29 06:51:01: Looks like low concentration B2H6 may be a couple more weeks Message-ID: