Problem epi2 SNF 2012-06-01 06:47:06: no wafer on blade
itot at snf.stanford.edu
itot at snf.stanford.edu
Fri Jun 1 06:47:07 PDT 2012
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Problem epi2 SNF 2012-06-01 06:47:06: no wafer on blade
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wafer does not go back. (Load lock B there is no wafer on blade)
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Problem epi2 SNF 2012-06-01 06:47:06: no wafer on blade
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