Problem epi2 SNF 2012-06-20 10:07:49: DOP2 flow error

sclaussen at snf.stanford.edu sclaussen at snf.stanford.edu
Wed Jun 20 10:07:50 PDT 2012


DOP2 errored out last night during a wafer. Can someone check the canister on it?




More information about the epi2-pcs mailing list