June 2012 Archives by date

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Starting: Fri Jun 1 06:47:07 PDT 2012
Ending: Fri Jun 29 06:51:02 PDT 2012
Messages: 25

• Problem epi2 SNF 2012-06-01 06:47:06: no wafer on blade   itot at snf.stanford.edu
• Comment epi2 SNF 2012-06-01 07:33:00: cancel my problem   itot at snf.stanford.edu
• Problem epi2 SNF 2012-06-01 06:47:06: no wafer on blade   tberg at snf.stanford.edu
• Comment epi2 SNF 2012-06-01 07:33:00: cancel my problem   tberg at snf.stanford.edu
• Problem epi2 SNF 2012-05-31 19:27:01: vacuum wand is broken.   tberg at snf.stanford.edu
• Problem epi2 SNF 2012-06-07 02:51:58: vacuum wand holder   audet at snf.stanford.edu
• Problem epi2 SNF 2012-06-07 02:51:58: vacuum wand holder   tberg at snf.stanford.edu
• Comment epi2 SNF 2012-05-29 15:20:29: flow SiH4   tberg at snf.stanford.edu
• Comment epi2 SNF 2012-05-18 13:49:37: Replaced Filter and MFC in Silane channel   tberg at snf.stanford.edu
• Shutdown epi2 SNF 2012-06-13 15:47:28: pin holes in exhaust   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2012-06-13 15:47:28: pin holes in exhaust   tberg at snf.stanford.edu
• epi is back up   Ted Berg
• Problem epi2 SNF 2012-06-18 14:10:26: HCL out?   audet at snf.stanford.edu
• Problem epi2 SNF 2012-06-18 14:10:26: HCL out?   tberg at snf.stanford.edu
• Shutdown epi2 SNF 2012-06-18 16:34:49: No HCl flow   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2012-06-18 16:34:49: No HCl flow   tberg at snf.stanford.edu
• Problem epi2 SNF 2012-06-20 10:07:49: DOP2 flow error   sclaussen at snf.stanford.edu
• Problem epi2 SNF 2012-06-20 10:26:12: 100 PPM B2H6 is almost Empty   tberg at snf.stanford.edu
• Shutdown epi2 SNF 2012-06-23 13:18:39: Process gas fire detectors & Burn box down   mtang at snf.stanford.edu
• Shutdown epi2 SNF 2012-06-23 13:18:39: Process gas fire detectors & Burn box down   tberg at snf.stanford.edu
• Problem epi2 SNF 2012-06-25 06:51:14: No Silane at this time   tberg at snf.stanford.edu
• Problem epi2 SNF 2012-06-25 06:51:14: No Silane at this time   tberg at snf.stanford.edu
• Comment epi2 SNF 2012-06-29 00:52:37: Epi2 can not be taken back to inert idle state   raisul at snf.stanford.edu
• Comment epi2 SNF 2012-06-29 00:52:37: Epi2 can not be taken back to inert idle state   tberg at snf.stanford.edu
• Comment epi2 SNF 2012-06-29 06:51:01: Looks like low concentration B2H6 may be a couple more weeks   tberg at snf.stanford.edu

Last message date: Fri Jun 29 06:51:02 PDT 2012
Archived on: Sun Dec 23 08:53:02 PST 2012

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