From dongrip at snf.stanford.edu Wed May 2 01:31:13 2012 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Wed, 2 May 2012 01:31:13 -0700 Subject: Shutdown epi2 SNF 2012-05-02 01:31:12: No HCl flow Message-ID: When I started to run Ge etch coat, I found the flow rate of HCl fell in the error range (zero value) within 30 sec after starting. However, no error message (HCl deviation error) occurred. Did somebody change the error setting of Ge etch coat? Although I didn't run any process, due to no error message, I highly suspect the severe dome coating... Please inspect this problem. Thanks. From tberg at snf.stanford.edu Wed May 2 06:22:04 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 2 May 2012 06:22:04 -0700 Subject: Problem epi2 SNF 2012-04-30 20:53:07: Do not run arsine Message-ID: ok to run From tberg at snf.stanford.edu Thu May 3 11:37:17 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 3 May 2012 11:37:17 -0700 Subject: Shutdown epi2 SNF 2012-05-02 01:31:12: No HCl flow Message-ID: replaced gas cabinet display board and brought gas cabinet back on line. Ran Geetch coat no problem From tberg at snf.stanford.edu Thu May 3 11:38:36 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 3 May 2012 11:38:36 -0700 Subject: Comment epi2 SNF 2012-02-09 06:11:14: Second chamber install in progress Message-ID: second chamber installed and functional. waiting for permits From tberg at snf.stanford.edu Thu May 3 11:39:00 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 3 May 2012 11:39:00 -0700 Subject: Comment epi2 SNF 2012-02-17 15:55:31: Second chamber install progress Message-ID: second chamber installed and functional. waiting for permits From tberg at snf.stanford.edu Thu May 3 11:39:16 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 3 May 2012 11:39:16 -0700 Subject: Comment epi2 SNF 2012-02-27 07:57:45: Message-ID: From tberg at snf.stanford.edu Thu May 3 11:39:34 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 3 May 2012 11:39:34 -0700 Subject: Comment epi2 SNF 2012-02-27 07:59:05: Second chamber install progress Message-ID: second chamber installed and functional. waiting for permits From tberg at snf.stanford.edu Thu May 3 11:39:48 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 3 May 2012 11:39:48 -0700 Subject: Comment epi2 SNF 2012-03-06 08:01:40: 2nd chamber install update Message-ID: second chamber installed and functional. waiting for permits From tberg at snf.stanford.edu Thu May 3 11:40:05 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 3 May 2012 11:40:05 -0700 Subject: Comment epi2 SNF 2012-03-08 16:38:32: 2nd chamber install update Message-ID: second chamber installed and functional. waiting for permits From tberg at snf.stanford.edu Thu May 3 11:41:24 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 3 May 2012 11:41:24 -0700 Subject: Comment epi2 SNF 2012-05-03 11:41:24: do not use Arsine at this time Message-ID: please do not use Arsine at this time. possible sensor issue From sclaussen at snf.stanford.edu Thu May 3 22:02:49 2012 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Thu, 3 May 2012 22:02:49 -0700 Subject: Problem epi2 SNF 2012-05-03 22:02:49: Heater contact error Message-ID: Got the error both when entering Hot Idle (eventually got it to work by resetting the system and trying again) and in the first step of our program. After resetting, the system got stuck on the "Confirming wafer position" step after we entered Automatic mode, and would not move on to the next step. Opened and re-loaded LLB. From audet at snf.stanford.edu Thu May 3 22:36:58 2012 From: audet at snf.stanford.edu (audet at snf.stanford.edu) Date: Thu, 3 May 2012 22:36:58 -0700 Subject: Problem epi2 SNF 2012-05-03 22:36:58: Chamber A heater contractor off Message-ID: After a few minutes "heater contactor off" and "low water flow" errors appeared and processing aborted. Reset chamber. From tberg at snf.stanford.edu Fri May 4 11:47:23 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 4 May 2012 11:47:23 -0700 Subject: Problem epi2 SNF 2012-05-03 22:02:49: Heater contact error Message-ID: This ofter happens when first starting up. Reset and try again is the solution From tberg at snf.stanford.edu Fri May 4 11:47:43 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 4 May 2012 11:47:43 -0700 Subject: Problem epi2 SNF 2012-05-03 22:36:58: Chamber A heater contractor off Message-ID: next user no problem From jasonlin at snf.stanford.edu Fri May 4 19:28:27 2012 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Fri, 4 May 2012 19:28:27 -0700 Subject: Problem epi2 SNF 2012-05-04 19:28:26: Ch A Heater Contactor Off & Low Water Flow Message-ID: Chamber A Heater Contactor Off fault in transition between step 7 and step 8 of Ge Etch Coat (going between 1100C bake to 1000C bake). Then, Chamber A Low Water Flow error. I tried to run it 3 times, all 3 times gave this error at the same point in Ge Etch Coat. From dongrip at snf.stanford.edu Mon May 7 06:11:05 2012 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Mon, 7 May 2012 06:11:05 -0700 Subject: Comment epi2 SNF 2012-05-07 06:11:05: Ge Etch Coat Step 8 Message-ID: I double checked Ge Etch Coat recipe based on Maurice's comment (2012/04/18). I changed the target temperature of Step 8 from 1000C to 950C as Maurice commented, and the recipe ran with no problem. From tberg at snf.stanford.edu Mon May 7 08:07:55 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 7 May 2012 08:07:55 -0700 Subject: Problem epi2 SNF 2012-05-04 19:28:26: Ch A Heater Contactor Off & Low Water Flow Message-ID: see dongrip comment. it is working OK now From dongrip at snf.stanford.edu Thu May 10 05:14:00 2012 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Thu, 10 May 2012 05:14:00 -0700 Subject: Shutdown epi2 SNF 2012-05-10 05:13:59: Heater Contractor Off & Low Water Flow Error Message-ID: I encountered heater contractor off & low water flow error many times during the Ge etch coat and during my process run. I double checked that Ge etch coat recipe is normal. Also, my process run is identical to the previous which was perfectly fine (the heaviest heating load is H2 annealing for 5 min at 1050C). The weird thing is that this happens once in 2 runs or in 3 runs. It seems as if the maximum allowable temperature is getting low due to this error. Please inspect this problem. Thanks. From maurice at snf.stanford.edu Thu May 10 16:32:49 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 10 May 2012 16:32:49 -0700 Subject: Comment epi2 SNF 2012-04-22 12:04:16: heater contractor off Message-ID: repeated message From maurice at snf.stanford.edu Mon May 14 13:31:13 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 14 May 2012 13:31:13 -0700 Subject: Shutdown epi2 SNF 2012-05-10 05:13:59: Heater Contractor Off & Low Water Flow Error Message-ID: AMAT came in purged quick disconnect fittings. They recommend we change all the water fittings. There is still intermittent water faults. From maurice at snf.stanford.edu Mon May 14 13:31:31 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 14 May 2012 13:31:31 -0700 Subject: Problem epi2 SNF 2012-05-14 13:31:30: still intermittent water faults. Message-ID: AMAT came in purged quick disconnect fittings. They recommend we change all the water fittings. There is still intermittent water faults. From itot at snf.stanford.edu Wed May 16 02:15:24 2012 From: itot at snf.stanford.edu (itot at snf.stanford.edu) Date: Wed, 16 May 2012 02:15:24 -0700 Subject: Problem epi2 SNF 2012-05-16 02:15:24: water flow problem Message-ID: Following errors show up and I can't start cleaning process. Chamber A HEATER contactor off Chamber A low water flow. From tberg at snf.stanford.edu Wed May 16 08:33:03 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 16 May 2012 08:33:03 -0700 Subject: Problem epi2 SNF 2012-05-16 02:15:24: water flow problem Message-ID: Ran 2 etch coats no problem. will keep observing From dongrip at snf.stanford.edu Wed May 16 14:37:07 2012 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Wed, 16 May 2012 14:37:07 -0700 Subject: Problem epi2 SNF 2012-05-16 14:37:07: low water flow & heater contactor problem again Message-ID: I couldn't even run the Ge etch coat to begin. I encountered this problem several times soon after when I ran the Ge etch coat. This issue quite randomly happens (Maurice also observed the same things). From itot at snf.stanford.edu Thu May 17 01:06:16 2012 From: itot at snf.stanford.edu (itot at snf.stanford.edu) Date: Thu, 17 May 2012 01:06:16 -0700 Subject: Problem epi2 SNF 2012-05-17 01:06:15: water flow problem Message-ID: I could run the Ge etch coat one time, but HEATER contactor off and low water flow errors occured several times. From tberg at snf.stanford.edu Thu May 17 06:18:05 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 17 May 2012 06:18:05 -0700 Subject: Problem epi2 SNF 2012-05-17 06:18:04: No DCS Message-ID: Cylinder will need to be changed From tberg at snf.stanford.edu Thu May 17 07:08:10 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 17 May 2012 07:08:10 -0700 Subject: Comment epi2 SNF 2012-05-17 07:08:09: DCS Cylinder changed in leak check Message-ID: DCS Cylinder changed in leak check From maurice at snf.stanford.edu Thu May 17 08:35:37 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 17 May 2012 08:35:37 -0700 Subject: Shutdown epi2 SNF 2012-05-17 08:35:36: No DCS Message-ID: can't run etch recipes without DCS From tberg at snf.stanford.edu Fri May 18 06:19:20 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 18 May 2012 06:19:20 -0700 Subject: Shutdown epi2 SNF 2012-05-17 08:35:36: No DCS Message-ID: DCS changed leak check OK back on now From tberg at snf.stanford.edu Fri May 18 06:19:28 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 18 May 2012 06:19:28 -0700 Subject: Comment epi2 SNF 2012-05-17 07:08:09: DCS Cylinder changed in leak check Message-ID: DCS changed leak check OK back on now From tberg at snf.stanford.edu Fri May 18 06:19:36 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 18 May 2012 06:19:36 -0700 Subject: Problem epi2 SNF 2012-05-17 06:18:04: No DCS Message-ID: DCS changed leak check OK back on now From tberg at snf.stanford.edu Fri May 18 11:36:58 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 18 May 2012 11:36:58 -0700 Subject: Comment epi2 SNF 2012-05-18 11:36:58: ran two etch coats no problem Message-ID: ran two etch coats no problem. use at your discretion From tberg at snf.stanford.edu Fri May 18 13:49:38 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 18 May 2012 13:49:38 -0700 Subject: Comment epi2 SNF 2012-05-18 13:49:37: Replaced Filter and MFC in Silane channel Message-ID: Replaced Filter and MFC in Silane channel. Gas panel for Silane has been replaced and leak checked. There is now N2 to the panel. Cylinder will be installed next week From itot at snf.stanford.edu Sat May 19 12:49:53 2012 From: itot at snf.stanford.edu (itot at snf.stanford.edu) Date: Sat, 19 May 2012 12:49:53 -0700 Subject: Problem epi2 SNF 2012-05-19 12:49:52: HEATER contactor off/low water flow error Message-ID: I can not run the Ge Etch Coat process since these error occurs continuously. This process is aborted at 5 or 6 step in Ge Etch Coat. From junam at snf.stanford.edu Sat May 19 17:03:51 2012 From: junam at snf.stanford.edu (junam at snf.stanford.edu) Date: Sat, 19 May 2012 17:03:51 -0700 Subject: Problem epi2 SNF 2012-05-19 17:03:50: heater contactor error Message-ID: heater contacter error and chamber a low water flow error are occuring continuously. i could run ge etch coat once, and could not proceed further due to those errors. From jasonlin at snf.stanford.edu Sun May 20 21:45:58 2012 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Sun, 20 May 2012 21:45:58 -0700 Subject: Comment epi2 SNF 2012-05-20 21:45:58: Heater contactor & low water Message-ID: Received these errors as well. From tberg at snf.stanford.edu Mon May 21 07:28:32 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 21 May 2012 07:28:32 -0700 Subject: Comment epi2 SNF 2012-05-03 11:41:24: do not use Arsine at this time Message-ID: arsine back on now From tberg at snf.stanford.edu Mon May 21 13:51:12 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Mon, 21 May 2012 13:51:12 -0700 Subject: Comment epi2 SNF 2012-05-21 13:51:12: waterflow/heatercontactor intermittent Message-ID: waterflow/heatercontactor intermittent use at your discression From maurice at snf.stanford.edu Mon May 21 16:05:14 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 21 May 2012 16:05:14 -0700 Subject: Shutdown epi2 SNF 2012-05-21 16:05:14: Arsine/water contactor Message-ID: Arsine/hydride sensor questions From tberg at snf.stanford.edu Tue May 29 13:26:43 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 29 May 2012 13:26:43 -0700 Subject: Problem epi2 SNF 2012-05-19 12:49:52: HEATER contactor off/low water flow error Message-ID: Replaced hoses and most quick connects on lower loop. Flow is now> 5 GPM.Ran 2 SiGe etch coats no problem. From tberg at snf.stanford.edu Tue May 29 13:26:51 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 29 May 2012 13:26:51 -0700 Subject: Problem epi2 SNF 2012-05-19 17:03:50: heater contactor error Message-ID: Replaced hoses and most quick connects on lower loop. Flow is now> 5 GPM.Ran 2 SiGe etch coats no problem. From tberg at snf.stanford.edu Tue May 29 13:27:01 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 29 May 2012 13:27:01 -0700 Subject: Comment epi2 SNF 2012-05-20 21:45:58: Heater contactor & low water Message-ID: Replaced hoses and most quick connects on lower loop. Flow is now> 5 GPM.Ran 2 SiGe etch coats no problem. From tberg at snf.stanford.edu Tue May 29 13:27:10 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 29 May 2012 13:27:10 -0700 Subject: Comment epi2 SNF 2012-05-21 13:51:12: waterflow/heatercontactor intermittent Message-ID: Replaced hoses and most quick connects on lower loop. Flow is now> 5 GPM.Ran 2 SiGe etch coats no problem. From tberg at snf.stanford.edu Tue May 29 13:27:42 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 29 May 2012 13:27:42 -0700 Subject: Shutdown epi2 SNF 2012-05-21 16:05:14: Arsine/water contactor Message-ID: Replaced hoses and most quick connects on lower loop. Flow is now> 5 GPM.Ran 2 SiGe etch coats no problem.. No Further issues with Arsine From tberg at snf.stanford.edu Tue May 29 13:28:03 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 29 May 2012 13:28:03 -0700 Subject: Problem epi2 SNF 2012-05-14 13:31:30: still intermittent water faults. Message-ID: Replaced hoses and most quick connects on lower loop. Flow is now> 5 GPM.Ran 2 SiGe etch coats no problem. From tberg at snf.stanford.edu Tue May 29 13:28:13 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 29 May 2012 13:28:13 -0700 Subject: Problem epi2 SNF 2012-04-22 11:44:47: Chamber A heater contractor off Message-ID: Replaced hoses and most quick connects on lower loop. Flow is now> 5 GPM.Ran 2 SiGe etch coats no problem. From tberg at snf.stanford.edu Tue May 29 13:28:21 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 29 May 2012 13:28:21 -0700 Subject: Problem epi2 SNF 2012-05-16 14:37:07: low water flow & heater contactor problem again Message-ID: Replaced hoses and most quick connects on lower loop. Flow is now> 5 GPM.Ran 2 SiGe etch coats no problem. From tberg at snf.stanford.edu Tue May 29 13:28:29 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 29 May 2012 13:28:29 -0700 Subject: Problem epi2 SNF 2012-05-17 01:06:15: water flow problem Message-ID: Replaced hoses and most quick connects on lower loop. Flow is now> 5 GPM.Ran 2 SiGe etch coats no problem. From tberg at snf.stanford.edu Tue May 29 13:28:49 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 29 May 2012 13:28:49 -0700 Subject: Comment epi2 SNF 2012-05-18 11:36:58: ran two etch coats no problem Message-ID: noted From maurice at snf.stanford.edu Tue May 29 15:20:30 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 29 May 2012 15:20:30 -0700 Subject: Comment epi2 SNF 2012-05-29 15:20:29: flow SiH4 Message-ID: Ran 3 etches with SiH4 no problems From tberg at snf.stanford.edu Wed May 30 13:53:41 2012 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 30 May 2012 13:53:41 -0700 Subject: Problem epi2 SNF 2012-04-18 15:33:50: Silane MFC issue Message-ID: silane is OK now From dongrip at snf.stanford.edu Thu May 31 19:27:01 2012 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Thu, 31 May 2012 19:27:01 -0700 Subject: Problem epi2 SNF 2012-05-31 19:27:01: vacuum wand is broken. Message-ID: vacuum wand is broken.