Shutdown epi2 SNF 2012-05-02 01:31:12: No HCl flow

dongrip at snf.stanford.edu dongrip at snf.stanford.edu
Wed May 2 01:31:13 PDT 2012


When I started to run Ge etch coat, I found the flow rate of HCl fell in the error range (zero value) within 30 sec after starting. However, no error message (HCl deviation error) occurred. Did somebody change the error setting of Ge etch coat? Although I didn't run any process, due to no error message, I highly suspect the severe dome coating... Please inspect this problem. Thanks.




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