Problem epi2 SNF 2012-04-30 20:53:07: Do not run arsine
tberg at snf.stanford.edu
tberg at snf.stanford.edu
Wed May 2 06:22:04 PDT 2012
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Shutdown epi2 SNF 2012-05-02 01:31:12: No HCl flow
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Comment epi2 SNF 2012-02-09 06:11:14: Second chamber install in progress
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ok to run
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Shutdown epi2 SNF 2012-05-02 01:31:12: No HCl flow
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Comment epi2 SNF 2012-02-09 06:11:14: Second chamber install in progress
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