Problem epi2 SNF 2012-05-03 22:02:49: Heater contact error

sclaussen at snf.stanford.edu sclaussen at snf.stanford.edu
Thu May 3 22:02:49 PDT 2012


Got the error both when entering Hot Idle (eventually got it to work by resetting the system and trying again) and in the first step of our program. After resetting, the system got stuck on the "Confirming wafer position" step after we entered Automatic mode, and would not move on to the next step. Opened and re-loaded LLB. 




More information about the epi2-pcs mailing list