Problem epi2 SNF 2012-05-04 19:28:26: Ch A Heater Contactor Off & Low Water Flow

jasonlin at snf.stanford.edu jasonlin at snf.stanford.edu
Fri May 4 19:28:27 PDT 2012


Chamber A Heater Contactor Off fault in transition between step 7 and step 8 of Ge Etch Coat (going between 1100C bake to 1000C bake).
Then, Chamber A Low Water Flow error.
I tried to run it 3 times, all 3 times gave this error at the same point in Ge Etch Coat.




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