Comment epi2 SNF 2012-05-07 06:11:05: Ge Etch Coat Step 8

dongrip at snf.stanford.edu dongrip at snf.stanford.edu
Mon May 7 06:11:05 PDT 2012


I double checked Ge Etch Coat recipe based on Maurice's comment (2012/04/18). I changed the target temperature of Step 8 from 1000C to 950C as Maurice commented, and the recipe ran with no problem. 




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