Shutdown epi2 SNF 2012-05-17 08:35:36: No DCS
tberg at snf.stanford.edu
tberg at snf.stanford.edu
Fri May 18 06:19:20 PDT 2012
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Shutdown epi2 SNF 2012-05-17 08:35:36: No DCS
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Comment epi2 SNF 2012-05-18 11:36:58: ran two etch coats no problem
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DCS changed leak check OK back on now
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Shutdown epi2 SNF 2012-05-17 08:35:36: No DCS
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Comment epi2 SNF 2012-05-18 11:36:58: ran two etch coats no problem
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