Problem epi2 SNF 2012-05-19 12:49:52: HEATER contactor off/low water flow error

itot at itot at
Sat May 19 12:49:53 PDT 2012

I can not run the Ge Etch Coat process since these error occurs continuously. This process is aborted at 5 or 6 step in Ge Etch Coat. 

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