Problem epi2 SNF 2012-05-19 17:03:50: heater contactor error

junam at snf.stanford.edu junam at snf.stanford.edu
Sat May 19 17:03:51 PDT 2012


heater contacter error and chamber a low water flow error are occuring continuously. i could run ge etch coat once, and could not proceed further due to those errors.




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