Problem epi2 SNF 2012-05-19 17:03:50: heater contactor error

junam at junam at
Sat May 19 17:03:51 PDT 2012

heater contacter error and chamber a low water flow error are occuring continuously. i could run ge etch coat once, and could not proceed further due to those errors.

More information about the epi2-pcs mailing list