Problem epi2 SNF 2012-05-19 17:03:50: heater contactor error

tberg at snf.stanford.edu tberg at snf.stanford.edu
Tue May 29 13:26:51 PDT 2012


Replaced hoses and most quick connects on lower loop. Flow is now>
5 GPM.Ran 2 SiGe etch coats no problem.




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