Comment epi2 SNF 2012-05-21 13:51:12: waterflow/heatercontactor intermittent

tberg at snf.stanford.edu tberg at snf.stanford.edu
Tue May 29 13:27:10 PDT 2012

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Replaced hoses and most quick connects on lower loop. Flow is now>
5 GPM.Ran 2 SiGe etch coats no problem.

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