Shutdown epi2 SNF 2012-05-21 16:05:14: Arsine/water contactor

tberg at snf.stanford.edu tberg at snf.stanford.edu
Tue May 29 13:27:42 PDT 2012


Replaced hoses and most quick connects on lower loop. Flow is now>
5 GPM.Ran 2 SiGe etch coats no problem.. No Further issues with 
Arsine




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