Problem epi2 SNF 2012-04-22 11:44:47: Chamber A heater contractor off

tberg at snf.stanford.edu tberg at snf.stanford.edu
Tue May 29 13:28:13 PDT 2012


Replaced hoses and most quick connects on lower loop. Flow is now>
5 GPM.Ran 2 SiGe etch coats no problem.




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