Problem epi2 SNF 2012-05-17 01:06:15: water flow problem

tberg at snf.stanford.edu tberg at snf.stanford.edu
Tue May 29 13:28:29 PDT 2012

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Replaced hoses and most quick connects on lower loop. Flow is now>
5 GPM.Ran 2 SiGe etch coats no problem.

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