Comment epi2 SNF 2012-05-29 15:20:29: flow SiH4
maurice at snf.stanford.edu
maurice at snf.stanford.edu
Tue May 29 15:20:30 PDT 2012
Previous message:
Problem epi2 SNF 2012-04-22 11:44:47: Chamber A heater contractor off
Next message:
Problem epi2 SNF 2012-04-18 15:33:50: Silane MFC issue
Messages sorted by:
[ date ]
[ thread ]
[ subject ]
[ author ]
Ran 3 etches with SiH4 no problems
Previous message:
Problem epi2 SNF 2012-04-22 11:44:47: Chamber A heater contractor off
Next message:
Problem epi2 SNF 2012-04-18 15:33:50: Silane MFC issue
Messages sorted by:
[ date ]
[ thread ]
[ subject ]
[ author ]
More information about the epi2-pcs mailing list