May 2012 Archives by date

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Starting: Wed May 2 01:31:13 PDT 2012
Ending: Thu May 31 19:27:01 PDT 2012
Messages: 52

• Shutdown epi2 SNF 2012-05-02 01:31:12: No HCl flow   dongrip at snf.stanford.edu
• Problem epi2 SNF 2012-04-30 20:53:07: Do not run arsine   tberg at snf.stanford.edu
• Shutdown epi2 SNF 2012-05-02 01:31:12: No HCl flow   tberg at snf.stanford.edu
• Comment epi2 SNF 2012-02-09 06:11:14: Second chamber install in progress   tberg at snf.stanford.edu
• Comment epi2 SNF 2012-02-17 15:55:31: Second chamber install progress   tberg at snf.stanford.edu
• Comment epi2 SNF 2012-02-27 07:57:45:   tberg at snf.stanford.edu
• Comment epi2 SNF 2012-02-27 07:59:05: Second chamber install progress   tberg at snf.stanford.edu
• Comment epi2 SNF 2012-03-06 08:01:40: 2nd chamber install update   tberg at snf.stanford.edu
• Comment epi2 SNF 2012-03-08 16:38:32: 2nd chamber install update   tberg at snf.stanford.edu
• Comment epi2 SNF 2012-05-03 11:41:24: do not use Arsine at this time   tberg at snf.stanford.edu
• Problem epi2 SNF 2012-05-03 22:02:49: Heater contact error   sclaussen at snf.stanford.edu
• Problem epi2 SNF 2012-05-03 22:36:58: Chamber A heater contractor off   audet at snf.stanford.edu
• Problem epi2 SNF 2012-05-03 22:02:49: Heater contact error   tberg at snf.stanford.edu
• Problem epi2 SNF 2012-05-03 22:36:58: Chamber A heater contractor off   tberg at snf.stanford.edu
• Problem epi2 SNF 2012-05-04 19:28:26: Ch A Heater Contactor Off & Low Water Flow   jasonlin at snf.stanford.edu
• Comment epi2 SNF 2012-05-07 06:11:05: Ge Etch Coat Step 8   dongrip at snf.stanford.edu
• Problem epi2 SNF 2012-05-04 19:28:26: Ch A Heater Contactor Off & Low Water Flow   tberg at snf.stanford.edu
• Shutdown epi2 SNF 2012-05-10 05:13:59: Heater Contractor Off & Low Water Flow Error   dongrip at snf.stanford.edu
• Comment epi2 SNF 2012-04-22 12:04:16: heater contractor off   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2012-05-10 05:13:59: Heater Contractor Off & Low Water Flow Error   maurice at snf.stanford.edu
• Problem epi2 SNF 2012-05-14 13:31:30: still intermittent water faults.   maurice at snf.stanford.edu
• Problem epi2 SNF 2012-05-16 02:15:24: water flow problem   itot at snf.stanford.edu
• Problem epi2 SNF 2012-05-16 02:15:24: water flow problem   tberg at snf.stanford.edu
• Problem epi2 SNF 2012-05-16 14:37:07: low water flow & heater contactor problem again   dongrip at snf.stanford.edu
• Problem epi2 SNF 2012-05-17 01:06:15: water flow problem   itot at snf.stanford.edu
• Problem epi2 SNF 2012-05-17 06:18:04: No DCS   tberg at snf.stanford.edu
• Comment epi2 SNF 2012-05-17 07:08:09: DCS Cylinder changed in leak check   tberg at snf.stanford.edu
• Shutdown epi2 SNF 2012-05-17 08:35:36: No DCS   maurice at snf.stanford.edu
• Shutdown epi2 SNF 2012-05-17 08:35:36: No DCS   tberg at snf.stanford.edu
• Comment epi2 SNF 2012-05-17 07:08:09: DCS Cylinder changed in leak check   tberg at snf.stanford.edu
• Problem epi2 SNF 2012-05-17 06:18:04: No DCS   tberg at snf.stanford.edu
• Comment epi2 SNF 2012-05-18 11:36:58: ran two etch coats no problem   tberg at snf.stanford.edu
• Comment epi2 SNF 2012-05-18 13:49:37: Replaced Filter and MFC in Silane channel   tberg at snf.stanford.edu
• Problem epi2 SNF 2012-05-19 12:49:52: HEATER contactor off/low water flow error   itot at snf.stanford.edu
• Problem epi2 SNF 2012-05-19 17:03:50: heater contactor error   junam at snf.stanford.edu
• Comment epi2 SNF 2012-05-20 21:45:58: Heater contactor & low water   jasonlin at snf.stanford.edu
• Comment epi2 SNF 2012-05-03 11:41:24: do not use Arsine at this time   tberg at snf.stanford.edu
• Comment epi2 SNF 2012-05-21 13:51:12: waterflow/heatercontactor intermittent   tberg at snf.stanford.edu
• Shutdown epi2 SNF 2012-05-21 16:05:14: Arsine/water contactor   maurice at snf.stanford.edu
• Problem epi2 SNF 2012-05-19 12:49:52: HEATER contactor off/low water flow error   tberg at snf.stanford.edu
• Problem epi2 SNF 2012-05-19 17:03:50: heater contactor error   tberg at snf.stanford.edu
• Comment epi2 SNF 2012-05-20 21:45:58: Heater contactor & low water   tberg at snf.stanford.edu
• Comment epi2 SNF 2012-05-21 13:51:12: waterflow/heatercontactor intermittent   tberg at snf.stanford.edu
• Shutdown epi2 SNF 2012-05-21 16:05:14: Arsine/water contactor   tberg at snf.stanford.edu
• Problem epi2 SNF 2012-05-14 13:31:30: still intermittent water faults.   tberg at snf.stanford.edu
• Problem epi2 SNF 2012-04-22 11:44:47: Chamber A heater contractor off   tberg at snf.stanford.edu
• Problem epi2 SNF 2012-05-16 14:37:07: low water flow & heater contactor problem again   tberg at snf.stanford.edu
• Problem epi2 SNF 2012-05-17 01:06:15: water flow problem   tberg at snf.stanford.edu
• Comment epi2 SNF 2012-05-18 11:36:58: ran two etch coats no problem   tberg at snf.stanford.edu
• Comment epi2 SNF 2012-05-29 15:20:29: flow SiH4   maurice at snf.stanford.edu
• Problem epi2 SNF 2012-04-18 15:33:50: Silane MFC issue   tberg at snf.stanford.edu
• Problem epi2 SNF 2012-05-31 19:27:01: vacuum wand is broken.   dongrip at snf.stanford.edu

Last message date: Thu May 31 19:27:01 PDT 2012
Archived on: Sun Dec 23 08:53:02 PST 2012

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