February 2013 Archives by thread

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Starting: Wed Feb 6 06:20:21 PST 2013
Ending: Wed Feb 27 09:15:04 PST 2013
Messages: 20

• [epi2-pcs] Comment epi2 SNF 2013-02-06 06:20:20: Still working on vacuum issues   tberg at stanford.edu
  • [epi2-pcs] Comment epi2 SNF 2013-02-06 06:20:20: Still working on vacuum issues   tberg at stanford.edu
• [epi2-pcs] Comment epi2 SNF 2013-01-30 09:09:35: status   tberg at stanford.edu
• [epi2-pcs] Shutdown epi2 SNF 2013-01-22 15:56:26: pressure deviation fault   tberg at stanford.edu
• [epi2-pcs] Comment epi2 SNF 2013-01-09 16:00:45: Ted adjusted 1000 torr manometer   tberg at stanford.edu
• [epi2-pcs] Comment epi2 SNF 2013-02-21 06:13:44: Chamber A blower fail   tberg at stanford.edu
• [epi2-pcs] Comment epi2 SNF 2013-02-21 08:05:04: Quartz in chamber B replaced   tberg at stanford.edu
• [epi2-pcs] Comment epi2 SNF 2013-02-22 10:53:00: Etch Coat done on Chamber B   tberg at stanford.edu
• [epi2-pcs] Comment epi2 SNF 2013-02-25 11:28:05: ran GeEtch coat ch B   tberg at stanford.edu
• [epi2-pcs] Shutdown epi2 SNF 2013-01-07 14:50:26: Hazey test   maurice at stanford.edu
• [epi2-pcs] Problem epi2 SNF 2013-01-07 08:58:49: needs testing   maurice at stanford.edu
• [epi2-pcs] Problem epi2 SNF 2013-01-07 16:20:34: No HCL flow   maurice at stanford.edu
• [epi2-pcs] Problem epi2 SNF 2013-02-25 17:23:24: Chamber A pump out for repair   maurice at stanford.edu
• [epi2-pcs] Problem epi2 SNF 2013-02-26 02:20:39: GE ETCH COAT fails + sequencer   junam at stanford.edu
  • [epi2-pcs] Problem epi2 SNF 2013-02-26 02:20:39: GE ETCH COAT fails + sequencer   maurice at stanford.edu
• [epi2-pcs] Problem epi2 SNF 2013-02-26 02:40:45: Ge growth: entire wafer not shiny   junam at stanford.edu
• [epi2-pcs] Comment epi2 SNF 2013-02-26 11:02:19: Inpected Chamber B dome/clean   maurice at stanford.edu
• [epi2-pcs] Comment epi2 SNF 2013-02-26 11:06:35: modified etch recipes/pressure 600torr   maurice at stanford.edu
• [epi2-pcs] Problem epi2 SNF 2013-02-26 21:52:50: sequencer not working properly, wafer stuck   junam at stanford.edu
  • [epi2-pcs] Problem epi2 SNF 2013-02-26 21:52:50: sequencer not working properly, wafer stuck   maurice at stanford.edu

Last message date: Wed Feb 27 09:15:04 PST 2013
Archived on: Wed Feb 27 09:15:05 PST 2013

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