From tberg at stanford.edu  Tue Jan 15 11:49:58 2013
From: tberg at stanford.edu (tberg at stanford.edu)
Date: Tue, 15 Jan 2013 11:49:58 -0800 (PST)
Subject: [epi2-pcs] Comment epi2 SNF 2013-01-15 11:49:57: replaced chamber A
	pump
Message-ID: <27253500.9.1358279398190.JavaMail.coral@snc-coraldb.stanford.edu>

Maurice testing

From tberg at stanford.edu  Thu Jan 17 08:12:37 2013
From: tberg at stanford.edu (tberg at stanford.edu)
Date: Thu, 17 Jan 2013 08:12:37 -0800 (PST)
Subject: [epi2-pcs] Comment epi2 SNF 2013-01-17 08:12:37: reset blower on
 chamber a pump
Message-ID: <7841608.0.1358439157830.JavaMail.coral@snc-coraldb.stanford.edu>


From maurice at stanford.edu  Sat Jan 19 20:15:18 2013
From: maurice at stanford.edu (maurice at stanford.edu)
Date: Sat, 19 Jan 2013 20:15:18 -0800 (PST)
Subject: [epi2-pcs] Comment epi2 SNF 2013-01-19 20:15:17: Intrinsic Ge Dep
	hazy
Message-ID: <25484045.35.1358655318314.JavaMail.coral@snc-coraldb.stanford.edu>

Purged Ge line for 20 min.
Repeat Intrinsic Ge test

From maurice at stanford.edu  Sat Jan 19 20:54:11 2013
From: maurice at stanford.edu (maurice at stanford.edu)
Date: Sat, 19 Jan 2013 20:54:11 -0800 (PST)
Subject: [epi2-pcs] Shutdown epi2 SNF 2013-01-19 20:54:11: pressure
	deviation fault
Message-ID: <18592269.36.1358657651907.JavaMail.coral@snc-coraldb.stanford.edu>

Blower?

From tberg at stanford.edu  Tue Jan 22 13:55:36 2013
From: tberg at stanford.edu (tberg at stanford.edu)
Date: Tue, 22 Jan 2013 13:55:36 -0800 (PST)
Subject: [epi2-pcs] Shutdown epi2 SNF 2013-01-19 20:54:11: pressure
	deviation fault
Message-ID: <10281416.63.1358891736346.JavaMail.coral@snc-coraldb.stanford.edu>

Replaced both chamber A and Chamber B pumps. Ran etch coat on
 chamber A. No problem getting 10T in cold Idle

From tberg at stanford.edu  Tue Jan 22 13:55:52 2013
From: tberg at stanford.edu (tberg at stanford.edu)
Date: Tue, 22 Jan 2013 13:55:52 -0800 (PST)
Subject: [epi2-pcs] Comment epi2 SNF 2013-01-17 08:12:37: reset blower
 on chamber a pump
Message-ID: <8032851.64.1358891752390.JavaMail.coral@snc-coraldb.stanford.edu>

Replaced pump

From tberg at stanford.edu  Tue Jan 22 13:56:24 2013
From: tberg at stanford.edu (tberg at stanford.edu)
Date: Tue, 22 Jan 2013 13:56:24 -0800 (PST)
Subject: [epi2-pcs] Comment epi2 SNF 2013-01-15 11:49:57: replaced
	chamber A pump
Message-ID: <19146252.65.1358891784465.JavaMail.coral@snc-coraldb.stanford.edu>

noted

From maurice at stanford.edu  Tue Jan 22 15:56:26 2013
From: maurice at stanford.edu (maurice at stanford.edu)
Date: Tue, 22 Jan 2013 15:56:26 -0800 (PST)
Subject: [epi2-pcs] Shutdown epi2 SNF 2013-01-22 15:56:26: pressure
	deviation fault
Message-ID: <23312136.71.1358898986675.JavaMail.coral@snc-coraldb.stanford.edu>

Pressure oscilating...not stable at 15 torr
When bringing system back on line after it aborts and goes into isolation, system says" bad 1000torr manometer reading".

From tberg at stanford.edu  Wed Jan 30 09:09:35 2013
From: tberg at stanford.edu (tberg at stanford.edu)
Date: Wed, 30 Jan 2013 09:09:35 -0800 (PST)
Subject: [epi2-pcs] Comment epi2 SNF 2013-01-30 09:09:35: status
Message-ID: <26727688.67.1359565775655.JavaMail.coral@snc-coraldb.stanford.edu>

Raqn Geetch coat on chamber B run Moetch on Chamber A