[epi2-pcs] Comment epi2 SNF 2013-01-19 20:15:17: Intrinsic Ge Dep hazy
maurice at stanford.edu
maurice at stanford.edu
Sat Jan 19 20:15:18 PST 2013
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[epi2-pcs] Comment epi2 SNF 2013-01-17 08:12:37: reset blower on chamber a pump
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[epi2-pcs] Shutdown epi2 SNF 2013-01-19 20:54:11: pressure deviation fault
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Purged Ge line for 20 min. Repeat Intrinsic Ge test
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[epi2-pcs] Comment epi2 SNF 2013-01-17 08:12:37: reset blower on chamber a pump
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[epi2-pcs] Shutdown epi2 SNF 2013-01-19 20:54:11: pressure deviation fault
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