[epi2-pcs] Shutdown epi2 SNF 2013-01-19 20:54:11: pressure deviation fault

tberg at stanford.edu tberg at stanford.edu
Tue Jan 22 13:55:36 PST 2013


Replaced both chamber A and Chamber B pumps. Ran etch coat on
 chamber A. No problem getting 10T in cold Idle


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