[epi2-pcs] Shutdown epi2 SNF 2013-01-22 15:56:26: pressure deviation fault

maurice at stanford.edu maurice at stanford.edu
Tue Jan 22 15:56:26 PST 2013


Pressure oscilating...not stable at 15 torr
When bringing system back on line after it aborts and goes into isolation, system says" bad 1000torr manometer reading".


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