From maurice at stanford.edu  Tue Apr 17 17:33:40 2007
From: maurice at stanford.edu (maurice stevens)
Date: Tue, 17 Apr 2007 17:33:40 -0700
Subject: Epi 2 up
Message-ID: <46256764.2010309@stanford.edu>

Robot arms straighted.
Blade replaced.
Susceptor ring replaced.
Chamber A dome replaced.
Wafers have been cycled in and out.
System baked.  Three Etch and Coats were run.
SiGe750-1 recipe was run.  No Haze.
5um-Pdope recipe was run.  Dep rate ~4um...as expected.
System up.


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maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278