Epi 2 up

maurice stevens maurice at stanford.edu
Wed Aug 8 16:53:30 PDT 2007

 From cbaxter:

Installed dry pump and at local mode, tried turning on pump but it shut 
down itself  and tripped the 30amp circuit breaker
on main remote box, found one the three phase ac input
power inside the junction (down in the basement) shorted
to ground due to a bad connection causing it to arc. re-do
ac wire connection with new wire nut connector.  turn on
w/out problem. put system chamber a on idle mode and
recovered wafer inside the chamber.

maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278

More information about the epi2 mailing list