From jrjain at stanford.edu  Fri Jun  1 09:41:17 2007
From: jrjain at stanford.edu (Jinendra Raja Jain)
Date: Fri, 1 Jun 2007 09:41:17 -0700
Subject: epi2 Workgroup Meeting
Message-ID: <006e01c7a46b$acd90c30$c36540ab@jrjainCIS>

Dear all,

 

We will hold our 2nd epi2 workgroup meeting this coming Tuesday, June 5 at
4:30pm in CIS-101.  All users are welcome and encouraged to attend.

 

We will discuss some important topics of interest at this meeting, including
the following:

 

-          Current deposition quality and uniformity

-          Chamber temperature issues, such as

o        Calibration via thermocouple

o        PID control

o        Contacts with Yonah from AMAT regarding emissivity values for the
optical pyrometers

-          Anything else users would like to address

 

Warm regards,

Raja

 

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From saraswat at cis.stanford.edu  Fri Jun  1 14:14:52 2007
From: saraswat at cis.stanford.edu (Krishna Saraswat)
Date: Fri, 1 Jun 2007 14:14:52 -0700
Subject: epi2 Workgroup Meeting
In-Reply-To: <006e01c7a46b$acd90c30$c36540ab@jrjainCIS>
References: <006e01c7a46b$acd90c30$c36540ab@jrjainCIS>
Message-ID: <3A47BD72-8A05-4EAC-8FA5-5660A53AF066@cis.stanford.edu>

Hi Raja,

I just returned from India. I will plan on attending the meeting as  
it will give me a quick update on the epi2.

Krishna


On Jun 1, 2007, at 9:41 AM, Jinendra Raja Jain wrote:

> Dear all,
>
>
>
> We will hold our 2nd epi2 workgroup meeting this coming Tuesday,  
> June 5 at 4:30pm in CIS-101.  All users are welcome and encouraged  
> to attend.
>
>
>
> We will discuss some important topics of interest at this meeting,  
> including the following:
>
>
>
> -          Current deposition quality and uniformity
>
> -          Chamber temperature issues, such as
>
> o        Calibration via thermocouple
>
> o        PID control
>
> o        Contacts with Yonah from AMAT regarding emissivity values  
> for the optical pyrometers
>
> -          Anything else users would like to address
>
>
>
> Warm regards,
>
> Raja
>
>
>
>



From renshen at stanford.edu  Mon Jun  4 22:53:34 2007
From: renshen at stanford.edu (Shen Ren)
Date: Mon, 4 Jun 2007 22:53:34 -0700
Subject: Reservation released
Message-ID: <628a66910706042253p7a6d776au55b52dd978d534aa@mail.gmail.com>

reservation released tomorrow due to time conflict.

-- 
Best wishes,

Shen Ren

Department of Electrical Engineering
Stanford University
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From maurice at stanford.edu  Tue Jun  5 15:06:16 2007
From: maurice at stanford.edu (maurice stevens)
Date: Tue, 05 Jun 2007 15:06:16 -0700
Subject: Epi2 Workgroup Meeting  today at 4:30 
Message-ID: <4665DE58.70900@stanford.edu>

I heard a rumor that there may be cookies at this meeting.  Today at 
4:30 in CIS 101.

-------- Original Message --------
Subject: 	epi2 Workgroup Meeting
Date: 	Fri, 1 Jun 2007 09:41:17 -0700
From: 	Jinendra Raja Jain <jrjain at stanford.edu>
To: 	<epi2 at snf.stanford.edu>
CC: 	'Yoshio Nishi' <nishiy at stanford.edu>, 'Paul Rissman' 
<rissman at stanford.edu>, 'Krishna Saraswat' <saraswat at cis.stanford.edu>, 
'James Harris' <harris at snow.stanford.edu>, 'Shin-ichi Kobayashi' 
<koba at seit.t-kougei.ac.jp>, 'maurice stevens' <maurice at stanford.edu>



Dear all,

 

We will hold our 2nd epi2 workgroup meeting this coming Tuesday, June 5 
at 4:30pm in CIS-101.  All users are welcome and encouraged to attend.

 

We will discuss some important topics of interest at this meeting, 
including the following:

 

-          Current deposition quality and uniformity

-          Chamber temperature issues, such as

o        Calibration via thermocouple

o        PID control

o        Contacts with Yonah from AMAT regarding emissivity values for 
the optical pyrometers

-          Anything else users would like to address

 

Warm regards,

Raja

 


-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278



From maurice at stanford.edu  Wed Jun  6 10:48:41 2007
From: maurice at stanford.edu (maurice stevens)
Date: Wed, 06 Jun 2007 10:48:41 -0700
Subject: Report EPI2  issues on coral
Message-ID: <4666F379.9000405@stanford.edu>

Hi All,

Please make a comment on coral if you have any mechanical issues with 
Epi2.  Even is you are able to recover from it.  We heard in the users 
meetings yesterday that we are having many more problems with the lift 
than we thought. 

Please describe the error and if you were able to continue processing.

thanks

-m

-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278



From jrjain at stanford.edu  Thu Jun  7 13:51:38 2007
From: jrjain at stanford.edu (Jinendra Raja Jain)
Date: Thu, 7 Jun 2007 13:51:38 -0700
Subject: epi2 4pm reservation cleared
Message-ID: <000c01c7a945$a4b52140$3a2342ab@jrjain>

Apologies for the late notice.

 

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From maurice at stanford.edu  Wed Jun 20 15:02:16 2007
From: maurice at stanford.edu (maurice stevens)
Date: Wed, 20 Jun 2007 15:02:16 -0700
Subject: test
Message-ID: <4679A3E8.3000204@stanford.edu>


-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278



From rshyam at stanford.edu  Mon Jun 25 14:10:07 2007
From: rshyam at stanford.edu (Shyam Sunder Raghunathan)
Date: Mon, 25 Jun 2007 14:10:07 -0700
Subject: Epi2 Workgroup Meeting
Message-ID: <20070625141007.zq3148sp3xw8408w@webmail.stanford.edu>

Hi all,

We will hold our 3rd epi2 workgroup meeting this Thursday, June 28 at  
3:00pm in CIS-101.  All users are welcome and encouraged to attend.

Thanks,

Shyam.






From jrjain at stanford.edu  Wed Jun 27 19:57:33 2007
From: jrjain at stanford.edu (Jinendra Raja Jain)
Date: Wed, 27 Jun 2007 19:57:33 -0700
Subject: Epi2 Available
Message-ID: <002e01c7b930$1361e520$372142ab@jrjain>

Finished early.

 

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