epi2 Workgroup Meeting
Jinendra Raja Jain
jrjain at stanford.edu
Fri Jun 1 09:41:17 PDT 2007
We will hold our 2nd epi2 workgroup meeting this coming Tuesday, June 5 at
4:30pm in CIS-101. All users are welcome and encouraged to attend.
We will discuss some important topics of interest at this meeting, including
- Current deposition quality and uniformity
- Chamber temperature issues, such as
o Calibration via thermocouple
o PID control
o Contacts with Yonah from AMAT regarding emissivity values for the
- Anything else users would like to address
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