epi2 Workgroup Meeting

Jinendra Raja Jain jrjain at stanford.edu
Fri Jun 1 09:41:17 PDT 2007


Dear all,

 

We will hold our 2nd epi2 workgroup meeting this coming Tuesday, June 5 at
4:30pm in CIS-101.  All users are welcome and encouraged to attend.

 

We will discuss some important topics of interest at this meeting, including
the following:

 

-          Current deposition quality and uniformity

-          Chamber temperature issues, such as

o        Calibration via thermocouple

o        PID control

o        Contacts with Yonah from AMAT regarding emissivity values for the
optical pyrometers

-          Anything else users would like to address

 

Warm regards,

Raja

 

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