epi2 Workgroup Meeting

Krishna Saraswat saraswat at cis.stanford.edu
Fri Jun 1 14:14:52 PDT 2007


Hi Raja,

I just returned from India. I will plan on attending the meeting as  
it will give me a quick update on the epi2.

Krishna


On Jun 1, 2007, at 9:41 AM, Jinendra Raja Jain wrote:

> Dear all,
>
>
>
> We will hold our 2nd epi2 workgroup meeting this coming Tuesday,  
> June 5 at 4:30pm in CIS-101.  All users are welcome and encouraged  
> to attend.
>
>
>
> We will discuss some important topics of interest at this meeting,  
> including the following:
>
>
>
> -          Current deposition quality and uniformity
>
> -          Chamber temperature issues, such as
>
> o        Calibration via thermocouple
>
> o        PID control
>
> o        Contacts with Yonah from AMAT regarding emissivity values  
> for the optical pyrometers
>
> -          Anything else users would like to address
>
>
>
> Warm regards,
>
> Raja
>
>
>
>




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