Epi2 Workgroup Meeting today at 4:30

maurice stevens maurice at stanford.edu
Tue Jun 5 15:06:16 PDT 2007


I heard a rumor that there may be cookies at this meeting.  Today at 
4:30 in CIS 101.

-------- Original Message --------
Subject: 	epi2 Workgroup Meeting
Date: 	Fri, 1 Jun 2007 09:41:17 -0700
From: 	Jinendra Raja Jain <jrjain at stanford.edu>
To: 	<epi2 at snf.stanford.edu>
CC: 	'Yoshio Nishi' <nishiy at stanford.edu>, 'Paul Rissman' 
<rissman at stanford.edu>, 'Krishna Saraswat' <saraswat at cis.stanford.edu>, 
'James Harris' <harris at snow.stanford.edu>, 'Shin-ichi Kobayashi' 
<koba at seit.t-kougei.ac.jp>, 'maurice stevens' <maurice at stanford.edu>



Dear all,

 

We will hold our 2nd epi2 workgroup meeting this coming Tuesday, June 5 
at 4:30pm in CIS-101.  All users are welcome and encouraged to attend.

 

We will discuss some important topics of interest at this meeting, 
including the following:

 

-          Current deposition quality and uniformity

-          Chamber temperature issues, such as

o        Calibration via thermocouple

o        PID control

o        Contacts with Yonah from AMAT regarding emissivity values for 
the optical pyrometers

-          Anything else users would like to address

 

Warm regards,

Raja

 


-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278




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