Report EPI2 issues on coral

maurice stevens maurice at
Wed Jun 6 10:48:41 PDT 2007

Hi All,

Please make a comment on coral if you have any mechanical issues with 
Epi2.  Even is you are able to recover from it.  We heard in the users 
meetings yesterday that we are having many more problems with the lift 
than we thought. 

Please describe the error and if you were able to continue processing.



maurice at

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278

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