From maurice at stanford.edu  Fri Mar  9 14:55:01 2007
From: maurice at stanford.edu (Maurice Stevens)
Date: Fri, 09 Mar 2007 14:55:01 -0800
Subject: Amat is coming tomorrow
Message-ID: <45F1E5C5.3060603@stanford.edu>

Sean from Amat is coming tomorrow (yes, on a Sat) to look at the wafer 
handling issue.


From maurice at stanford.edu  Tue Mar 13 15:41:01 2007
From: maurice at stanford.edu (maurice stevens)
Date: Tue, 13 Mar 2007 15:41:01 -0700
Subject: Epi2:  Broken wafer transfer blade
In-Reply-To: <1173767921.45f646f1b4448@webmail.stanford.edu>
References: <1173767921.45f646f1b4448@webmail.stanford.edu>
Message-ID: <45F7287D.5020709@stanford.edu>

AMAT Sean came on Sat and found that the blade was broken (the blades 
moves the wafer from the load lock to the process chamber).

Sean from AMAT is trying to find out how to get one.  The problem is 
that we have a six inch epi reactor that has a four inch kit installed.  
They don't stock that kit.

There is an AMAT drawing and an AMAT part number...so it can be made 
again.  But we may have to wait for them to figure out the process of 
having it made.




-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278



From tberg at stanford.edu  Fri Mar 16 13:37:54 2007
From: tberg at stanford.edu (Ted Berg)
Date: Fri, 16 Mar 2007 13:37:54 -0700
Subject: Blade status
Message-ID: <45FB0022.2070802@stanford.edu>

Hello all as most of you know the blade was broken last week and is on 
order. There are none currently available AMAT is working withe the 
vendor to get a replacement. Sorry for the delay. ted


From maurice at stanford.edu  Tue Mar 27 09:56:42 2007
From: maurice at stanford.edu (maurice stevens)
Date: Tue, 27 Mar 2007 09:56:42 -0700
Subject: AMAT will be in Today
In-Reply-To: <46093CE3.9010703@stanford.edu>
References: <46093CE3.9010703@stanford.edu>
Message-ID: <46094CCA.3030409@stanford.edu>

>  
Sean from AMAT called a few minutes ago to let us know he will be in 
this afternoon to work on the blade. 

He expects it will take a few days to figure out how the first blade broke.

-m


-- 

maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278



From maurice at stanford.edu  Wed Mar 28 11:14:09 2007
From: maurice at stanford.edu (maurice stevens)
Date: Wed, 28 Mar 2007 11:14:09 -0700
Subject: AMAT working on blade
Message-ID: <460AB071.70805@stanford.edu>

Sean from AMAT was here last night and is here now working on the 
blade.  He thinks it will be up this afternoon.

He has also ordered a spare blade.


-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278



From maurice at stanford.edu  Wed Mar 28 16:04:53 2007
From: maurice at stanford.edu (maurice stevens)
Date: Wed, 28 Mar 2007 16:04:53 -0700
Subject: [Fwd: Sorry suceptor ring is cracked]
Message-ID: <460AF495.3010801@stanford.edu>



-------- Original Message --------
Subject: 	Sorry suceptor ring is cracked
Date: 	Wed, 28 Mar 2007 12:41:49 -0700
From: 	Ted Berg <tberg at stanford.edu>
To: 	epi2-pcs at snf.stanford.edu



Sorry after blade adjustment we checked chamber and found the suceptor 
ring was cracked . ordering parts ted


-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278



From maurice at stanford.edu  Thu Mar 29 10:59:35 2007
From: maurice at stanford.edu (maurice stevens)
Date: Thu, 29 Mar 2007 10:59:35 -0700
Subject: epi2  update: Susceptor ring ordered
Message-ID: <460BFE87.5010506@stanford.edu>



-------- Original Message --------
Subject: 	Comment epi2 SNF 2007-03-29 10:57:15: update: Susceptor ring 
ordered
Date: 	Thu, 29 Mar 2007 10:57:15 -0700
From: 	maurice at snf.stanford.edu
To: 	epi2-pcs at snf.stanford.edu



AMAT Sean called this morning to let us know that the ring has been ordered and he expects to has it early next week.  
Once he has it he will get with Ted to install it.



-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278