Epi2: Broken wafer transfer blade

maurice stevens maurice at stanford.edu
Tue Mar 13 15:41:01 PDT 2007

AMAT Sean came on Sat and found that the blade was broken (the blades 
moves the wafer from the load lock to the process chamber).

Sean from AMAT is trying to find out how to get one.  The problem is 
that we have a six inch epi reactor that has a four inch kit installed.  
They don't stock that kit.

There is an AMAT drawing and an AMAT part number...so it can be made 
again.  But we may have to wait for them to figure out the process of 
having it made.

maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278

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