[Fwd: Sorry suceptor ring is cracked]

maurice stevens maurice at stanford.edu
Wed Mar 28 16:04:53 PDT 2007



-------- Original Message --------
Subject: 	Sorry suceptor ring is cracked
Date: 	Wed, 28 Mar 2007 12:41:49 -0700
From: 	Ted Berg <tberg at stanford.edu>
To: 	epi2-pcs at snf.stanford.edu



Sorry after blade adjustment we checked chamber and found the suceptor 
ring was cracked . ordering parts ted


-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278




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