From rik9 at stanford.edu Thu May 3 23:43:43 2007 From: rik9 at stanford.edu (Rishi Kant) Date: Thu, 03 May 2007 22:43:43 -0800 Subject: 1 am onward reservation deleted Message-ID: <463AD61F.7090704@stanford.edu> From jrjain at stanford.edu Fri May 4 14:51:39 2007 From: jrjain at stanford.edu (Jinendra Raja Jain) Date: Fri, 4 May 2007 14:51:39 -0700 Subject: epi2: Friday 5:30pm- Reservation Canceled Message-ID: <003101c78e96$65388530$0200a8c0@jrjain> Apologies for the late notice. -------------- next part -------------- An HTML attachment was scrubbed... URL: From nevran at stanford.edu Sun May 6 10:30:13 2007 From: nevran at stanford.edu (Nevran Ozguven) Date: Sun, 06 May 2007 10:30:13 -0700 Subject: epi2 reservation canceled Message-ID: <463E10A5.8060402@stanford.edu> I canceled my reservation for this morning. Sorry for the late notice. -Nevran From maurice at stanford.edu Mon May 7 13:38:12 2007 From: maurice at stanford.edu (maurice stevens) Date: Mon, 07 May 2007 13:38:12 -0700 Subject: [Fwd: Re: Shutdown epi2 SNF 2007-05-06 21:08:13: Wafer not on blade error] Message-ID: <463F8E34.4000402@stanford.edu> Epi2 up. -------- Original Message -------- Subject: Re: Shutdown epi2 SNF 2007-05-06 21:08:13: Wafer not on blade error Date: Mon, 7 May 2007 12:18:25 -0700 From: eenriquez at snf.stanford.edu To: epi2-pcs at snf.stanford.edu Unloaded user's wafers and placed them in his box. Cycled 10 wafers but unable to duplicate the problem. Maurice is cycling some more wafers. -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From jrjain at stanford.edu Thu May 10 22:22:38 2007 From: jrjain at stanford.edu (Jinendra Raja Jain) Date: Thu, 10 May 2007 22:22:38 -0700 Subject: epi2 Reservation Cancelled Message-ID: <005101c7938c$6400d870$0200a8c0@jrjain> Midnight reservation cancelled. Apologies for the late notice. -------------- next part -------------- An HTML attachment was scrubbed... URL: From jrjain at stanford.edu Fri May 11 11:37:51 2007 From: jrjain at stanford.edu (Jinendra Raja Jain) Date: Fri, 11 May 2007 11:37:51 -0700 Subject: epi2 Saturday reservation cancelled Message-ID: <003001c793fb$7af80f20$c36540ab@jrjainCIS> Temperature control problems -------------- next part -------------- An HTML attachment was scrubbed... URL: From jrjain at stanford.edu Fri May 11 11:14:27 2007 From: jrjain at stanford.edu (Jinendra Raja Jain) Date: Fri, 11 May 2007 11:14:27 -0700 Subject: epi2 noon reservation cancelled Message-ID: <002501c793f8$362cd9f0$c36540ab@jrjainCIS> Apologies for the late notice. Epi2 has temperature control problems (e.g. 35deg. difference between wafer top and bottom at 700C setpoint). The difference at 700C used to be ~5 (max 10deg.). -------------- next part -------------- An HTML attachment was scrubbed... URL: From rshyam at stanford.edu Fri May 11 17:17:09 2007 From: rshyam at stanford.edu (Shyam Sunder Raghunathan) Date: Fri, 11 May 2007 17:17:09 -0700 Subject: 6:30 pm reservation cancelled Message-ID: <20070511171709.gtbu8e84fu4kgos4@webmail.stanford.edu> From maurice at stanford.edu Thu May 17 10:17:11 2007 From: maurice at stanford.edu (maurice stevens) Date: Thu, 17 May 2007 10:17:11 -0700 Subject: Etch recipe IMPORTANT Message-ID: <464C8E17.4040101@stanford.edu> The Dome (the top of the deposition chamber) was removed, acid cleaned and reinstalled yesterday. The system was baked and purged overnight. The system was leak checked this morning with a leak rate of 1.4 mT/min. This incident put the system down for more than a day. We will be inspecting the dome each working day (monday-friday) in the morning until further notice. The system will be shutdown if we see deposition on the dome. _*This is to keep the system from imploding.*_ The length of all etch steps in the etch recipes has been tripled. We were surprised to see that the dome was coated since all users should be doing relativity thin layers. So either our etch recipes are not sufficient or users are growing layers thicker than they are admitting to depositing or users are using the wrong etch program. So: _*Etch after each processed wafer.*_ *_If you are depositing Ge or SiGe with high Ge content then you must use the Ge etch recipe after each wafer._* The Ge etch recipe is a low temp etch that will remove Ge. The other high temp etch recipe will cause the Ge to coat the dome. _*If you are doing thick SiGe or Ge deposition, come talk to me.*_ Will will have to create a special etch recipe. _*The max Si deposition is 3um.*_ -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From jrjain at stanford.edu Mon May 21 00:54:04 2007 From: jrjain at stanford.edu (Jinendra Raja Jain) Date: Mon, 21 May 2007 00:54:04 -0700 Subject: Epi2 Workgroup Meeting Message-ID: <000901c79b7d$33bc6370$0200a8c0@jrjain> To all epi2 users, There will be an epi2 workgroup meeting for interested faculty, labmembers, and staff (process and maintenance) this coming Wednesday, May 23 at 1:30pm in CIS-101. Topics of discussion include machine status and recent problems, accumulated process knowledge, operational and maintenance best practices, and any other relevant issues of interest. Equipment users with interesting process results, especially regarding SiGe and Ge depositions, are highly encouraged to prepare a few Powerpoint slides. Lab administration is hoping this regular meeting will act as a forum for group learning and standard recipe development on the system, so all contributions are welcome and appreciated. Please contact me at jrjain at stanford.edu regarding a different meeting day/time by Monday night if desired. Thank you, Raja -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Tue May 22 09:37:19 2007 From: maurice at stanford.edu (maurice stevens) Date: Tue, 22 May 2007 09:37:19 -0700 Subject: test mail Message-ID: <46531C3F.8070608@stanford.edu> Please ignore this test mailing. -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From maurice at stanford.edu Wed May 23 17:41:38 2007 From: maurice at stanford.edu (maurice stevens) Date: Wed, 23 May 2007 17:41:38 -0700 Subject: Cancel reservation!! Message-ID: <4654DF42.9010509@stanford.edu> Hey Gang, Cancel reservation if you don't use it and send out an email. If you finish your reservation early, send out an email. I have had several complaints about people not using their reservation. -m -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From jrjain at stanford.edu Thu May 24 10:28:47 2007 From: jrjain at stanford.edu (Jinendra Raja Jain) Date: Thu, 24 May 2007 10:28:47 -0700 Subject: epi2 Reservation Cleared - Free until 2pm Message-ID: <000001c79e28$fc8985a0$0200a8c0@jrjain> Wafer not ready. Apologies for late notice. -------------- next part -------------- An HTML attachment was scrubbed... URL: From jrjain at stanford.edu Fri May 25 02:53:33 2007 From: jrjain at stanford.edu (Jinendra Raja Jain) Date: Fri, 25 May 2007 02:53:33 -0700 Subject: epi2 10am Friday reservation cleared Message-ID: <000601c79eb2$8e770300$452242ab@jrjain> Finished early. Epi2 free until 1pm. -------------- next part -------------- An HTML attachment was scrubbed... URL: From jrjain at stanford.edu Sat May 26 00:06:15 2007 From: jrjain at stanford.edu (Jinendra Raja Jain) Date: Sat, 26 May 2007 00:06:15 -0700 Subject: epi2 Morning Reservation Cleared Message-ID: <000f01c79f64$59c49570$292242ab@jrjain> .due to temperature control problems. -------------- next part -------------- An HTML attachment was scrubbed... URL: From rshyam at stanford.edu Mon May 28 16:32:26 2007 From: rshyam at stanford.edu (Shyam Raghunathan) Date: Mon, 28 May 2007 16:32:26 -0700 Subject: reservation at 2030 tonight cancelled Message-ID: <7c105450705281632v7c1317d4s6f14ba75d881ce6b@mail.gmail.com> From jrjain at stanford.edu Tue May 29 17:15:37 2007 From: jrjain at stanford.edu (Jinendra Raja Jain) Date: Tue, 29 May 2007 17:15:37 -0700 Subject: epi2 finished early Message-ID: <001501c7a24f$a651c000$c36540ab@jrjainCIS> Epi2 is free from now until 7:30pm. -------------- next part -------------- An HTML attachment was scrubbed... URL: From jrjain at stanford.edu Wed May 30 15:27:04 2007 From: jrjain at stanford.edu (Jinendra Raja Jain) Date: Wed, 30 May 2007 15:27:04 -0700 Subject: epi2 free after 8:30pm tonight Message-ID: <00d501c7a309$a6e58000$0300a8c0@jrjain> Finishing early -------------- next part -------------- An HTML attachment was scrubbed... URL: From jimbond at stanford.edu Thu May 31 16:47:07 2007 From: jimbond at stanford.edu (jimbond at stanford.edu) Date: Thu, 31 May 2007 16:47:07 -0700 Subject: Epi2 available until 6pm Message-ID: <20070531164707.r9kw9pssdk00o8kg@webmail.stanford.edu> Finished early, available until 6:00pm. Best From rshyam at stanford.edu Thu May 31 16:58:59 2007 From: rshyam at stanford.edu (Shyam Raghunathan) Date: Thu, 31 May 2007 16:58:59 -0700 Subject: Reservation at 6 pm cancelled Message-ID: <7c105450705311658j64b95944la30cbd13a74cc85c@mail.gmail.com> From nevran at stanford.edu Thu May 31 18:49:28 2007 From: nevran at stanford.edu (Nevran Ozguven) Date: Thu, 31 May 2007 18:49:28 -0700 Subject: Tomorrow morning reservation cancelled (6/1) Message-ID: <465F7B28.1030405@stanford.edu> Moved it to afternoon. -Nevran