From maurice at stanford.edu Thu Nov 1 16:58:21 2007 From: maurice at stanford.edu (maurice stevens) Date: Thu, 01 Nov 2007 16:58:21 -0700 Subject: HCl update Message-ID: <472A681D.7030908@stanford.edu> Bad news: The HCl panel arrived. It was installed, purged and leak checked. As our guys started systematically introducing HCl to each part of the panel, they discovered that panel vendor had installed a low pressure valve in the panel. The vendor has been contacted and will be here tomorrow with a new panel (many parts in the panel are wielded in to reduce the number of possible leak points... the valve is part of a major section...it cannot be simply replaced). The new panel will need to be installed, purged and leak checked. We will update you when we have more info. -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From maurice at stanford.edu Fri Nov 2 14:47:17 2007 From: maurice at stanford.edu (maurice stevens) Date: Fri, 02 Nov 2007 14:47:17 -0700 Subject: [Fwd: Re: Comment epi SNF 2007-11-02 08:42:08: HCl update] Message-ID: <472B9AE5.50203@stanford.edu> -------- Original Message -------- Subject: Re: Comment epi SNF 2007-11-02 08:42:08: HCl update Date: Fri, 2 Nov 2007 14:27:34 -0700 From: eenriquez at snf.stanford.edu To: epi-pcs at snf.stanford.edu Installed new HCl panel and purge. HCl is now back on. -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From maurice at stanford.edu Fri Nov 2 15:01:11 2007 From: maurice at stanford.edu (maurice stevens) Date: Fri, 02 Nov 2007 15:01:11 -0700 Subject: Ge User Meeting In-Reply-To: <46F809C2.6050003@stanford.edu> References: <628a66910708201722q5ff3309ck77260bfb784c4cdd@mail.gmail.com> <46F809C2.6050003@stanford.edu> Message-ID: <472B9E27.9040901@stanford.edu> Hello all, We are having a Ge community user meeting this Thursday (Nov 8th) at 3pm in Room CIS 201 (a different room!). We will try to finalize a cleaning procedure for Ge grown on Si wafers in epi2 and in which equipment these wafers can go. I will be out on that day so please contact Ed Myers if you have comments or concerns prior to the meeting. -m -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From ofidaner at stanford.edu Sat Nov 3 09:32:56 2007 From: ofidaner at stanford.edu (Onur Fidaner) Date: Sat, 03 Nov 2007 09:32:56 -0700 Subject: available until 1 pm today (Saturday) Message-ID: <20071103093256.75p6cnxkkcgk8owc@webmail.stanford.edu> From bwchui at yahoo.com Sat Nov 3 16:17:11 2007 From: bwchui at yahoo.com (Benjamin Chui) Date: Sat, 3 Nov 2007 16:17:11 -0700 (PDT) Subject: Epi2 free Sunday PM, tuesday AM Message-ID: <533394.3968.qm@web36507.mail.mud.yahoo.com> Epi2 free Sunday PM 1330-, tuesday AM 1000- From rshyam at stanford.edu Tue Nov 6 08:20:47 2007 From: rshyam at stanford.edu (Shyam Raghunathan) Date: Tue, 6 Nov 2007 08:20:47 -0800 Subject: epi2 free from 10 am to 1.30 pm Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: From eenriquez at snf.stanford.edu Tue Nov 6 14:32:01 2007 From: eenriquez at snf.stanford.edu (Elmer Enriquez) Date: Tue, 06 Nov 2007 14:32:01 -0800 Subject: EPI2 discussion group site Message-ID: <4730EB61.7080803@snf.stanford.edu> I have started an EPI2 discussion group site. Please send me you email address if you want to be invited. Once you've receive the invitation, you need to reply in order to activate your access. Elmer From edmyers at stanford.edu Wed Nov 7 15:05:37 2007 From: edmyers at stanford.edu (Ed Myers) Date: Wed, 07 Nov 2007 15:05:37 -0800 Subject: Ge User Meeting In-Reply-To: <472B9E27.9040901@stanford.edu> References: <628a66910708201722q5ff3309ck77260bfb784c4cdd@mail.gmail.com> <46F809C2.6050003@stanford.edu> <472B9E27.9040901@stanford.edu> Message-ID: <6.2.5.6.2.20071107145520.03d78c38@stanford.edu> All, I have a mandatory Stanford University meeting I must attend that runs up to 3pm. As a result I will be 15-30 minutes late. Please cover the standard epi2 questions, then we can discuss the Ge cleans once I arrive. Regards, Ed At 02:01 PM 11/2/2007, maurice stevens wrote: >Hello all, > >We are having a Ge community user meeting this Thursday (Nov 8th) at >3pm in Room CIS 201 (a different room!). > >We will try to finalize a cleaning procedure for Ge grown on Si >wafers in epi2 and in which equipment these wafers can go. > >I will be out on that day so please contact Ed Myers if you have >comments or concerns prior to the meeting. > >-m > >-- >maurice at stanford.edu > >Maurice Stevens >Stanford Nanofabrication Facility >CIS Room 142, Mail Code 4070 >Stanford, CA 94305 >P. (650)725-3660 >F. (650)725.6278 From renshen at stanford.edu Wed Nov 7 17:31:53 2007 From: renshen at stanford.edu (Shen Ren) Date: Wed, 7 Nov 2007 17:31:53 -0800 Subject: Tool Down Message-ID: <628a66910711071731o1f2f0ef3tc83a3582302e78d0@mail.gmail.com> Dear EPI2 User, Tool is down due to main scrubber fault. Elmer and Cesar are working on it right now. Tool is down untill further notice. My wafer is stucked inside the chamber. I left a wafer box beside the desk. Please help me unload my wafer if the tool is up. Thanks so much. -- Best wishes, Shen Ren Department of Electrical Engineering Stanford University "The Chinese call luck opportunity and they say it knocks every day on your door. Some people hear it; some do not. It's not enough to hear opportunity knock. You must let him in, greet him, make friends and work together." - Bernard Gittelson -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Fri Nov 9 15:23:15 2007 From: maurice at stanford.edu (maurice at stanford.edu) Date: Fri, 09 Nov 2007 15:23:15 -0800 Subject: Fwd: Shutdown epi2 SNF 2007-11-09 15:19:46: Vacuum pump over pressure Message-ID: <20071109152315.nqn9s3wuscg044ko@webmail.stanford.edu> ----- Forwarded message from maurice at snf.stanford.edu ----- Date: Fri, 9 Nov 2007 15:19:47 -0800 From: maurice at snf.stanford.edu Reply-To: maurice at snf.stanford.edu Subject: Shutdown epi2 SNF 2007-11-09 15:19:46: Vacuum pump over pressure To: epi2-pcs at snf.stanford.edu After running the third wafer (all the same recipe) the reactor shutdown in the middle of the 4th deposition. Vaccum pump over pressure or over temp Hazard warning EXH at ATM Foreline pressure greater than ATM ----- End forwarded message ----- From maurice at snf.stanford.edu Mon Nov 12 16:03:42 2007 From: maurice at snf.stanford.edu (maurice) Date: Mon, 12 Nov 2007 16:03:42 -0800 Subject: Epi2 up Message-ID: <4738E9DE.9010903@snf.stanford.edu> Field service found a defective interlock jumper inside the pump package. Replaced jumper and restarted the pump. Ran Si etch program and a Ge program as a tested. Pump worked fine. From ofidaner at yahoo.com Mon Nov 12 21:04:53 2007 From: ofidaner at yahoo.com (Onur Fidaner) Date: Mon, 12 Nov 2007 21:04:53 -0800 (PST) Subject: epi2 available Tuesday 6AM-noon Message-ID: <248102.15202.qm@web56108.mail.re3.yahoo.com> ____________________________________________________________________________________ Get easy, one-click access to your favorites. Make Yahoo! your homepage. http://www.yahoo.com/r/hs From maurice at stanford.edu Tue Nov 13 17:36:37 2007 From: maurice at stanford.edu (maurice stevens) Date: Tue, 13 Nov 2007 17:36:37 -0800 Subject: Epi2 free tomorrow 10am- 1pm Message-ID: <473A5125.8090206@stanford.edu> Finished wafers today. -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From hweiyin at stanford.edu Wed Nov 14 20:53:50 2007 From: hweiyin at stanford.edu (Serene Koh) Date: Wed, 14 Nov 2007 20:53:50 -0800 Subject: epi2: Reservation canceled Friday 9am to 1pm Message-ID: <8b7d24450711142053y63a47ffby5c1fd78b1832521@mail.gmail.com> From rshyam at stanford.edu Thu Nov 15 11:33:03 2007 From: rshyam at stanford.edu (Shyam Raghunathan) Date: Thu, 15 Nov 2007 11:33:03 -0800 Subject: epi2 free from 4 pm to 5 pm Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: From rik9 at stanford.edu Thu Nov 15 15:48:23 2007 From: rik9 at stanford.edu (Rishi Kant) Date: Thu, 15 Nov 2007 15:48:23 -0800 Subject: Can't use the 4-5 pm reservation today Message-ID: <8dee002b0711151548x5af53163g23557273cbb92467@mail.gmail.com> Sorry for the late notice. I got roped into a meeting just as I was heading into the SNF. -- --------------- Rishi Kant PhD Candidate, EE Stanford University, USA ------------------------------------ From rshyam at stanford.edu Fri Nov 16 17:10:33 2007 From: rshyam at stanford.edu (Shyam Raghunathan) Date: Fri, 16 Nov 2007 17:10:33 -0800 Subject: epi2 free at 6 pm Message-ID: sorry for the late notice -------------- next part -------------- An HTML attachment was scrubbed... URL: From masaharu at stanford.edu Fri Nov 16 17:13:48 2007 From: masaharu at stanford.edu (Masaharu Kobayashi) Date: Fri, 16 Nov 2007 17:13:48 -0800 Subject: Epi2 free 0:00-6:00 Message-ID: <20071116171348.vgmd9ien40osos4s@webmail.stanford.edu> From ofidaner at yahoo.com Sat Nov 17 20:04:31 2007 From: ofidaner at yahoo.com (Onur Fidaner) Date: Sat, 17 Nov 2007 20:04:31 -0800 (PST) Subject: epi2 reservation removed 8:30-12:30 (Sunday) Message-ID: <922912.74268.qm@web56101.mail.re3.yahoo.com> ____________________________________________________________________________________ Never miss a thing. Make Yahoo your home page. http://www.yahoo.com/r/hs From hweiyin at stanford.edu Mon Nov 19 11:28:13 2007 From: hweiyin at stanford.edu (Serene Koh) Date: Mon, 19 Nov 2007 11:28:13 -0800 Subject: Epi2 reservations cancelled Tuesday 1.30 to 5.30pm Message-ID: <8b7d24450711191128h3590218bjc646c5ec61fca477@mail.gmail.com> From masaharu at stanford.edu Tue Nov 20 11:58:31 2007 From: masaharu at stanford.edu (Masaharu Kobayashi) Date: Tue, 20 Nov 2007 11:58:31 -0800 Subject: epi2 free 17:30-24:00 Message-ID: <20071120115831.bjhdwfqi3kgkwg0g@webmail.stanford.edu> From maurice at stanford.edu Wed Nov 21 11:23:15 2007 From: maurice at stanford.edu (maurice at stanford.edu) Date: Wed, 21 Nov 2007 11:23:15 -0800 Subject: Fwd: Shutdown epi2 SNF 2007-11-21 11:19:37: Pinhole in the susceptor Message-ID: <20071121112315.rqnlb2d0sgckow8c@webmail.stanford.edu> ----- Forwarded message from maurice at snf.stanford.edu ----- Date: Wed, 21 Nov 2007 11:19:37 -0800 From: maurice at snf.stanford.edu Reply-To: maurice at snf.stanford.edu Subject: Shutdown epi2 SNF 2007-11-21 11:19:37: Pinhole in the susceptor To: epi2-pcs at snf.stanford.edu One user is finding haze on his Ge depositions. We inspected the dome and found it has light haze on it. We also found a spot on the susceptor that looks like a pinhole. A pinhole pan cause haze and cross contamination. ----- End forwarded message ----- From maurice at stanford.edu Tue Nov 27 14:50:41 2007 From: maurice at stanford.edu (maurice stevens) Date: Tue, 27 Nov 2007 14:50:41 -0800 Subject: [Fwd: Comment epi2 SNF 2007-11-27 14:41:44: Update on susceptor change] Message-ID: <474C9F41.1010302@stanford.edu> From Elmer: -------- Original Message -------- Subject: Comment epi2 SNF 2007-11-27 14:41:44: Update on susceptor change Date: Tue, 27 Nov 2007 14:41:44 -0800 From: eenriquez at snf.stanford.edu To: epi2-pcs at snf.stanford.edu Had problems with the new dome. Mike cleaned the old dome. We will installs it along with a brand new susceptor tomorrow. -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From maurice at stanford.edu Tue Nov 27 15:15:16 2007 From: maurice at stanford.edu (maurice stevens) Date: Tue, 27 Nov 2007 15:15:16 -0800 Subject: reservation rules Message-ID: <474CA504.4080507@stanford.edu> Some of you may not be aware of the reservation rules for Epi2. 1. 4-hour reservation prime time rule: This policy limits the time that non-staff agents may reserve a piece of equipment during prime time to 4 hours each day for each member and project combination. 2. 12-hour reservation total time rule: Non-staff agents may only reserve a total of 12 hours on this equipment for any member and project. Reservation that exceed the rules will be removed tomorrow. -m -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From maurice at stanford.edu Wed Nov 28 18:04:06 2007 From: maurice at stanford.edu (maurice stevens) Date: Wed, 28 Nov 2007 18:04:06 -0800 Subject: status 11/28/07 Message-ID: <474E1E16.5010207@stanford.edu> Elmer has new susceptor and the cleaned doom in place. We have run a few runs that are coming out with haze. Each run looks a little better than the previous. The base is a little high. We expect 1.0 torr but we are only reaching 1.52torr. The haze and the high base are not unusual for a system that has been at atm for a couple of days. We will continue to bake the system and run wafers to get rid of the haze/ high base. -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From maurice at stanford.edu Thu Nov 29 10:49:41 2007 From: maurice at stanford.edu (maurice stevens) Date: Thu, 29 Nov 2007 10:49:41 -0800 Subject: epi2 update 11/29/07 Message-ID: <474F09C5.6050109@stanford.edu> On our fifth haze test wafer it appears that one of the three wafer lift pin stuck (jammed, got bound, got stuck, ...didn't lift). This broke one of the three legs of the pin lifter. It also tilted the susceptor and caused the wafer blade to break. We are checking our inventory for spare parts and investigating having some parts fire polished so the don't bind. -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278